Demonstration of tantalum as a structural material for MEMS thermal actuators

Demonstration of tantalum as a structural material for MEMS thermal actuators

Abstract This work demonstrates the processing, modeling, and characterization of nanocrystalline refractory metal tantalum (Ta) as a new structural material for microelectromechanical system (MEMS) thermal actuators (TAs). Nanocrystalline Ta films have a coefficient of thermal expansion (CTE) and Y...

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Bibliographic Details
Main Authors: Longchang Ni, Ryan M. Pocratsky, Maarten P. de Boer
Format: Article
Language:English
Published: Nature Publishing Group 2021-01-01
Series:Microsystems & Nanoengineering
Online Access:https://doi.org/10.1038/s41378-020-00232-z

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