Ultra Miniature 1850 <italic>&#x03BC;m</italic><sup>2</sup> Ring Oscillator Based Temperature Sensor

Temperature sensing is a necessity in semiconductor products, in order to monitor die behavior and avoid thermal runaway, while achieving high performance. Integrated sensors are used to monitor and regulate numerous hot spots across the die to prevent reliability issues. As the hot spots are in the...

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Main Authors: Natan Vinshtok-Melnik, Joseph Shor
Format: Article
Language:English
Published: IEEE 2020-01-01
Series:IEEE Access
Subjects:
Online Access:https://ieeexplore.ieee.org/document/9093007/
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author Natan Vinshtok-Melnik
Joseph Shor
author_facet Natan Vinshtok-Melnik
Joseph Shor
author_sort Natan Vinshtok-Melnik
collection DOAJ
description Temperature sensing is a necessity in semiconductor products, in order to monitor die behavior and avoid thermal runaway, while achieving high performance. Integrated sensors are used to monitor and regulate numerous hot spots across the die to prevent reliability issues. As the hot spots are in the most congested areas of the chip, it is also desirable for the sensors to have a very small sensing element which can be placed close to the hot-spot. The sensors are also used to monitor the coldest parts of the chip to determine the required Vdd level. These functions require the sensors to be very compact as well as low energy. A ring oscillator based temperature sensor is presented in TSMCs 65nm node, with an area of 1850&#x03BC;m<sup>2</sup>. This sensor has a novel structure which is similar to a bandgap reference, with the BJT devices replaced by scaled ring oscillators. The sensor exhibits a 3-sigma inaccuracy of &#x00B1;1&#x00B0;C near the throttle point, for hot-spot sensing, and &#x00B1; 2.5&#x00B0;C over the -10&#x00B0;C to 110&#x00B0;C range. The power supply rejection is 2.4&#x00B0;C/V. The sensor consumes 0.94nJ per 10&#x03BC;s conversion and achieves a resolution FOM of 96pJ-K<sup>2</sup>.
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spelling doaj.art-8dcc6297940c46869b461d56049ceedb2022-12-21T22:01:56ZengIEEEIEEE Access2169-35362020-01-018914159142310.1109/ACCESS.2020.29943269093007Ultra Miniature 1850 <italic>&#x03BC;m</italic><sup>2</sup> Ring Oscillator Based Temperature SensorNatan Vinshtok-Melnik0Joseph Shor1https://orcid.org/0000-0002-9184-8642Faculty of Engineering, Bar Ilan University, Ramat Gan, IsraelFaculty of Engineering, Bar Ilan University, Ramat Gan, IsraelTemperature sensing is a necessity in semiconductor products, in order to monitor die behavior and avoid thermal runaway, while achieving high performance. Integrated sensors are used to monitor and regulate numerous hot spots across the die to prevent reliability issues. As the hot spots are in the most congested areas of the chip, it is also desirable for the sensors to have a very small sensing element which can be placed close to the hot-spot. The sensors are also used to monitor the coldest parts of the chip to determine the required Vdd level. These functions require the sensors to be very compact as well as low energy. A ring oscillator based temperature sensor is presented in TSMCs 65nm node, with an area of 1850&#x03BC;m<sup>2</sup>. This sensor has a novel structure which is similar to a bandgap reference, with the BJT devices replaced by scaled ring oscillators. The sensor exhibits a 3-sigma inaccuracy of &#x00B1;1&#x00B0;C near the throttle point, for hot-spot sensing, and &#x00B1; 2.5&#x00B0;C over the -10&#x00B0;C to 110&#x00B0;C range. The power supply rejection is 2.4&#x00B0;C/V. The sensor consumes 0.94nJ per 10&#x03BC;s conversion and achieves a resolution FOM of 96pJ-K<sup>2</sup>.https://ieeexplore.ieee.org/document/9093007/Low powerring oscillatorssub-threshold designMOS temperature sensors
spellingShingle Natan Vinshtok-Melnik
Joseph Shor
Ultra Miniature 1850 <italic>&#x03BC;m</italic><sup>2</sup> Ring Oscillator Based Temperature Sensor
IEEE Access
Low power
ring oscillators
sub-threshold design
MOS temperature sensors
title Ultra Miniature 1850 <italic>&#x03BC;m</italic><sup>2</sup> Ring Oscillator Based Temperature Sensor
title_full Ultra Miniature 1850 <italic>&#x03BC;m</italic><sup>2</sup> Ring Oscillator Based Temperature Sensor
title_fullStr Ultra Miniature 1850 <italic>&#x03BC;m</italic><sup>2</sup> Ring Oscillator Based Temperature Sensor
title_full_unstemmed Ultra Miniature 1850 <italic>&#x03BC;m</italic><sup>2</sup> Ring Oscillator Based Temperature Sensor
title_short Ultra Miniature 1850 <italic>&#x03BC;m</italic><sup>2</sup> Ring Oscillator Based Temperature Sensor
title_sort ultra miniature 1850 italic x03bc m italic sup 2 sup ring oscillator based temperature sensor
topic Low power
ring oscillators
sub-threshold design
MOS temperature sensors
url https://ieeexplore.ieee.org/document/9093007/
work_keys_str_mv AT natanvinshtokmelnik ultraminiature1850italicx03bcmitalicsup2supringoscillatorbasedtemperaturesensor
AT josephshor ultraminiature1850italicx03bcmitalicsup2supringoscillatorbasedtemperaturesensor