Phase characterisation of metalenses

Abstract Metalenses have emerged as a new optical element or system in recent years, showing superior performance and abundant applications. However, the phase distribution of a metalens has not been measured directly up to now, hindering further quantitative evaluation of its performance. We have d...

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Main Authors: Maoxiong Zhao, Mu Ku Chen, Ze-Peng Zhuang, Yiwen Zhang, Ang Chen, Qinmiao Chen, Wenzhe Liu, Jiajun Wang, Ze-Ming Chen, Bo Wang, Xiaohan Liu, Haiwei Yin, Shumin Xiao, Lei Shi, Jian-Wen Dong, Jian Zi, Din Ping Tsai
Format: Article
Language:English
Published: Nature Publishing Group 2021-03-01
Series:Light: Science & Applications
Online Access:https://doi.org/10.1038/s41377-021-00492-y
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author Maoxiong Zhao
Mu Ku Chen
Ze-Peng Zhuang
Yiwen Zhang
Ang Chen
Qinmiao Chen
Wenzhe Liu
Jiajun Wang
Ze-Ming Chen
Bo Wang
Xiaohan Liu
Haiwei Yin
Shumin Xiao
Lei Shi
Jian-Wen Dong
Jian Zi
Din Ping Tsai
author_facet Maoxiong Zhao
Mu Ku Chen
Ze-Peng Zhuang
Yiwen Zhang
Ang Chen
Qinmiao Chen
Wenzhe Liu
Jiajun Wang
Ze-Ming Chen
Bo Wang
Xiaohan Liu
Haiwei Yin
Shumin Xiao
Lei Shi
Jian-Wen Dong
Jian Zi
Din Ping Tsai
author_sort Maoxiong Zhao
collection DOAJ
description Abstract Metalenses have emerged as a new optical element or system in recent years, showing superior performance and abundant applications. However, the phase distribution of a metalens has not been measured directly up to now, hindering further quantitative evaluation of its performance. We have developed an interferometric imaging phase measurement system to measure the phase distribution of a metalens by taking only one photo of the interference pattern. Based on the measured phase distribution, we analyse the negative chromatic aberration effect of monochromatic metalenses and propose a feature size of metalenses. Different sensitivities of the phase response to wavelength between the Pancharatnam-Berry phase-based metalens and propagation phase-reliant metalens are directly observed in the experiment. Furthermore, through phase distribution analysis, it is found that the distance between the measured metalens and the brightest spot of focusing will deviate from the focal length when the metalens has a low nominal numerical aperture, even though the metalens is ideal without any fabrication error. We also use the measured phase distribution to quantitatively characterise the imaging performance of the metalens. Our phase measurement system will help not only designers optimise the designs of metalenses but also fabricants distinguish defects to improve the fabrication process, which will pave the way for metalenses in industrial applications.
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spelling doaj.art-8eac9fe89c534479841bc68436792e332022-12-21T20:22:19ZengNature Publishing GroupLight: Science & Applications2047-75382021-03-0110111110.1038/s41377-021-00492-yPhase characterisation of metalensesMaoxiong Zhao0Mu Ku Chen1Ze-Peng Zhuang2Yiwen Zhang3Ang Chen4Qinmiao Chen5Wenzhe Liu6Jiajun Wang7Ze-Ming Chen8Bo Wang9Xiaohan Liu10Haiwei Yin11Shumin Xiao12Lei Shi13Jian-Wen Dong14Jian Zi15Din Ping Tsai16State Key Laboratory of Surface Physics, Key Laboratory of Micro- and Nano-Photonic Structures (Ministry of Education) and Department of Physics, Fudan UniversityDepartment of Electronic and Information Engineering, The Hong Kong Polytechnic UniversitySchool of Physics and State Key Laboratory of Optoelectronic Materials and Technologies, Sun Yat-sen UniversityState Key Laboratory of Surface Physics, Key Laboratory of Micro- and Nano-Photonic Structures (Ministry of Education) and Department of Physics, Fudan UniversityShanghai Engineering Research Center of Optical Metrology for Nano-fabrication (SERCOM)State Key Laboratory on Tunable Laser Technology, Ministry of Industry and Information Technology Key Lab of Micro-Nano Optoelectronic Information System, Shenzhen Graduate School, Harbin Institute of TechnologyState Key Laboratory of Surface Physics, Key Laboratory of Micro- and Nano-Photonic Structures (Ministry of Education) and Department of Physics, Fudan UniversityState Key Laboratory of Surface Physics, Key Laboratory of Micro- and Nano-Photonic Structures (Ministry of Education) and Department of Physics, Fudan UniversitySchool of Physics and State Key Laboratory of Optoelectronic Materials and Technologies, Sun Yat-sen UniversityState Key Laboratory of Surface Physics, Key Laboratory of Micro- and Nano-Photonic Structures (Ministry of Education) and Department of Physics, Fudan UniversityState Key Laboratory of Surface Physics, Key Laboratory of Micro- and Nano-Photonic Structures (Ministry of Education) and Department of Physics, Fudan UniversityShanghai Engineering Research Center of Optical Metrology for Nano-fabrication (SERCOM)State Key Laboratory on Tunable Laser Technology, Ministry of Industry and Information Technology Key Lab of Micro-Nano Optoelectronic Information System, Shenzhen Graduate School, Harbin Institute of TechnologyState Key Laboratory of Surface Physics, Key Laboratory of Micro- and Nano-Photonic Structures (Ministry of Education) and Department of Physics, Fudan UniversitySchool of Physics and State Key Laboratory of Optoelectronic Materials and Technologies, Sun Yat-sen UniversityState Key Laboratory of Surface Physics, Key Laboratory of Micro- and Nano-Photonic Structures (Ministry of Education) and Department of Physics, Fudan UniversityDepartment of Electronic and Information Engineering, The Hong Kong Polytechnic UniversityAbstract Metalenses have emerged as a new optical element or system in recent years, showing superior performance and abundant applications. However, the phase distribution of a metalens has not been measured directly up to now, hindering further quantitative evaluation of its performance. We have developed an interferometric imaging phase measurement system to measure the phase distribution of a metalens by taking only one photo of the interference pattern. Based on the measured phase distribution, we analyse the negative chromatic aberration effect of monochromatic metalenses and propose a feature size of metalenses. Different sensitivities of the phase response to wavelength between the Pancharatnam-Berry phase-based metalens and propagation phase-reliant metalens are directly observed in the experiment. Furthermore, through phase distribution analysis, it is found that the distance between the measured metalens and the brightest spot of focusing will deviate from the focal length when the metalens has a low nominal numerical aperture, even though the metalens is ideal without any fabrication error. We also use the measured phase distribution to quantitatively characterise the imaging performance of the metalens. Our phase measurement system will help not only designers optimise the designs of metalenses but also fabricants distinguish defects to improve the fabrication process, which will pave the way for metalenses in industrial applications.https://doi.org/10.1038/s41377-021-00492-y
spellingShingle Maoxiong Zhao
Mu Ku Chen
Ze-Peng Zhuang
Yiwen Zhang
Ang Chen
Qinmiao Chen
Wenzhe Liu
Jiajun Wang
Ze-Ming Chen
Bo Wang
Xiaohan Liu
Haiwei Yin
Shumin Xiao
Lei Shi
Jian-Wen Dong
Jian Zi
Din Ping Tsai
Phase characterisation of metalenses
Light: Science & Applications
title Phase characterisation of metalenses
title_full Phase characterisation of metalenses
title_fullStr Phase characterisation of metalenses
title_full_unstemmed Phase characterisation of metalenses
title_short Phase characterisation of metalenses
title_sort phase characterisation of metalenses
url https://doi.org/10.1038/s41377-021-00492-y
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