AC/DC Fields Demodulation Methods of Resonant Electric Field Microsensor
Electric field microsensors have the advantages of a small size, a low power consumption, of avoiding wear, and of measuring both direct-current (DC) and alternating-current (AC) fields, which are especially suited to applications in power systems. However, previous reports were chiefly concerned wi...
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| Format: | Article |
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MDPI AG
2020-05-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/11/5/511 |
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| author | Pengfei Yang Xiaolong Wen Zhaozhi Chu Xiaoming Ni Chunrong Peng |
| author_facet | Pengfei Yang Xiaolong Wen Zhaozhi Chu Xiaoming Ni Chunrong Peng |
| author_sort | Pengfei Yang |
| collection | DOAJ |
| description | Electric field microsensors have the advantages of a small size, a low power consumption, of avoiding wear, and of measuring both direct-current (DC) and alternating-current (AC) fields, which are especially suited to applications in power systems. However, previous reports were chiefly concerned with proposing new structures or improving the resolution, and there are no systematic studies on the signal characteristics of the microsensor output and the demodulation methods under different electric fields. In this paper, the use of an improved resonant microsensor with coplanar electrodes, and the signal characteristics under a DC field, power frequency field, and AC/DC hybrid fields were thoroughly analyzed respectively, and matching demodulation methods derived from synchronous detection were proposed. We theoretically obtained that the frequencies of the detectable electric fields should be less than half of the resonant frequency of the microsensor, and that the sensitivities of the microsensor were identical for AC/DC hybrid fields with different frequencies. Experiments were conducted to verify the proposed demodulation methods. Within electric field ranges of 0–667 kV/m, the uncertainties were 2.4% and 1.5% for the most common DC and 50 Hz power frequency fields, respectively. The frequency characteristic test results of the microsensor were in agreement with those of the theoretical analysis in the range of 0–1 kHz. |
| first_indexed | 2024-03-10T19:44:56Z |
| format | Article |
| id | doaj.art-8f11bcfcb2e545f281d129f91df45928 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-10T19:44:56Z |
| publishDate | 2020-05-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-8f11bcfcb2e545f281d129f91df459282023-11-20T00:54:59ZengMDPI AGMicromachines2072-666X2020-05-0111551110.3390/mi11050511AC/DC Fields Demodulation Methods of Resonant Electric Field MicrosensorPengfei Yang0Xiaolong Wen1Zhaozhi Chu2Xiaoming Ni3Chunrong Peng4School of Applied Science, Beijing Information Science and Technology University, Beijing 100192, ChinaSchool of Mathematics and Physics, University of Science and Technology Beijing, Beijing 100083, ChinaInstitute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, ChinaSchool of Applied Science, Beijing Information Science and Technology University, Beijing 100192, ChinaState Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100094, ChinaElectric field microsensors have the advantages of a small size, a low power consumption, of avoiding wear, and of measuring both direct-current (DC) and alternating-current (AC) fields, which are especially suited to applications in power systems. However, previous reports were chiefly concerned with proposing new structures or improving the resolution, and there are no systematic studies on the signal characteristics of the microsensor output and the demodulation methods under different electric fields. In this paper, the use of an improved resonant microsensor with coplanar electrodes, and the signal characteristics under a DC field, power frequency field, and AC/DC hybrid fields were thoroughly analyzed respectively, and matching demodulation methods derived from synchronous detection were proposed. We theoretically obtained that the frequencies of the detectable electric fields should be less than half of the resonant frequency of the microsensor, and that the sensitivities of the microsensor were identical for AC/DC hybrid fields with different frequencies. Experiments were conducted to verify the proposed demodulation methods. Within electric field ranges of 0–667 kV/m, the uncertainties were 2.4% and 1.5% for the most common DC and 50 Hz power frequency fields, respectively. The frequency characteristic test results of the microsensor were in agreement with those of the theoretical analysis in the range of 0–1 kHz.https://www.mdpi.com/2072-666X/11/5/511electric field sensorresonancemicro-electro-mechanical systems (MEMS)AC/DC electric fieldsdemodulation methodsfrequency bandwidth |
| spellingShingle | Pengfei Yang Xiaolong Wen Zhaozhi Chu Xiaoming Ni Chunrong Peng AC/DC Fields Demodulation Methods of Resonant Electric Field Microsensor Micromachines electric field sensor resonance micro-electro-mechanical systems (MEMS) AC/DC electric fields demodulation methods frequency bandwidth |
| title | AC/DC Fields Demodulation Methods of Resonant Electric Field Microsensor |
| title_full | AC/DC Fields Demodulation Methods of Resonant Electric Field Microsensor |
| title_fullStr | AC/DC Fields Demodulation Methods of Resonant Electric Field Microsensor |
| title_full_unstemmed | AC/DC Fields Demodulation Methods of Resonant Electric Field Microsensor |
| title_short | AC/DC Fields Demodulation Methods of Resonant Electric Field Microsensor |
| title_sort | ac dc fields demodulation methods of resonant electric field microsensor |
| topic | electric field sensor resonance micro-electro-mechanical systems (MEMS) AC/DC electric fields demodulation methods frequency bandwidth |
| url | https://www.mdpi.com/2072-666X/11/5/511 |
| work_keys_str_mv | AT pengfeiyang acdcfieldsdemodulationmethodsofresonantelectricfieldmicrosensor AT xiaolongwen acdcfieldsdemodulationmethodsofresonantelectricfieldmicrosensor AT zhaozhichu acdcfieldsdemodulationmethodsofresonantelectricfieldmicrosensor AT xiaomingni acdcfieldsdemodulationmethodsofresonantelectricfieldmicrosensor AT chunrongpeng acdcfieldsdemodulationmethodsofresonantelectricfieldmicrosensor |