Air Damping Analysis of a Micro-Coriolis Mass Flow Sensor
A micro-Coriolis mass flow sensor is a resonating device that measures small mass flows of fluid. A large vibration amplitude is desired as the Coriolis forces due to mass flow and, accordingly, the signal-to-noise ratio, are directly proportional to the vibration amplitude. Therefore, it is importa...
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MDPI AG
2022-01-01
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| Series: | Sensors |
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| Online Access: | https://www.mdpi.com/1424-8220/22/2/673 |
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| author | Yaxiang Zeng Remco Sanders Remco J. Wiegerink Joost C. Lötters |
| author_facet | Yaxiang Zeng Remco Sanders Remco J. Wiegerink Joost C. Lötters |
| author_sort | Yaxiang Zeng |
| collection | DOAJ |
| description | A micro-Coriolis mass flow sensor is a resonating device that measures small mass flows of fluid. A large vibration amplitude is desired as the Coriolis forces due to mass flow and, accordingly, the signal-to-noise ratio, are directly proportional to the vibration amplitude. Therefore, it is important to maximize the quality factor Q so that a large vibration amplitude can be achieved without requiring high actuation voltages and high power consumption. This paper presents an investigation of the Q factor of different devices in different resonant modes. Q factors were measured both at atmospheric pressure and in vacuum. The measurement results are compared with theoretical predictions. In the atmospheric environment, the Q factor increases when the resonance frequency increases. When reducing the pressure from 1 bar to <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mrow><mn>0.1</mn></mrow></semantics></math></inline-formula> bar, the Q factor almost doubles. At even lower pressures, the Q factor is inversely proportional to the pressure until intrinsic effects start to dominate, resulting in a maximum Q factor of approximately 7200. |
| first_indexed | 2024-03-10T00:32:39Z |
| format | Article |
| id | doaj.art-8f3144d21f7641678ba63456547f6ff6 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-03-10T00:32:39Z |
| publishDate | 2022-01-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-8f3144d21f7641678ba63456547f6ff62023-11-23T15:22:34ZengMDPI AGSensors1424-82202022-01-0122267310.3390/s22020673Air Damping Analysis of a Micro-Coriolis Mass Flow SensorYaxiang Zeng0Remco Sanders1Remco J. Wiegerink2Joost C. Lötters3Integrated Devices and Systems Group, University of Twente, P.O. Box 217, 7500 AE Enschede, The NetherlandsIntegrated Devices and Systems Group, University of Twente, P.O. Box 217, 7500 AE Enschede, The NetherlandsIntegrated Devices and Systems Group, University of Twente, P.O. Box 217, 7500 AE Enschede, The NetherlandsIntegrated Devices and Systems Group, University of Twente, P.O. Box 217, 7500 AE Enschede, The NetherlandsA micro-Coriolis mass flow sensor is a resonating device that measures small mass flows of fluid. A large vibration amplitude is desired as the Coriolis forces due to mass flow and, accordingly, the signal-to-noise ratio, are directly proportional to the vibration amplitude. Therefore, it is important to maximize the quality factor Q so that a large vibration amplitude can be achieved without requiring high actuation voltages and high power consumption. This paper presents an investigation of the Q factor of different devices in different resonant modes. Q factors were measured both at atmospheric pressure and in vacuum. The measurement results are compared with theoretical predictions. In the atmospheric environment, the Q factor increases when the resonance frequency increases. When reducing the pressure from 1 bar to <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mrow><mn>0.1</mn></mrow></semantics></math></inline-formula> bar, the Q factor almost doubles. At even lower pressures, the Q factor is inversely proportional to the pressure until intrinsic effects start to dominate, resulting in a maximum Q factor of approximately 7200.https://www.mdpi.com/1424-8220/22/2/673Coriolis mass flow sensorresonant sensorsmechanical dissipationair damping |
| spellingShingle | Yaxiang Zeng Remco Sanders Remco J. Wiegerink Joost C. Lötters Air Damping Analysis of a Micro-Coriolis Mass Flow Sensor Sensors Coriolis mass flow sensor resonant sensors mechanical dissipation air damping |
| title | Air Damping Analysis of a Micro-Coriolis Mass Flow Sensor |
| title_full | Air Damping Analysis of a Micro-Coriolis Mass Flow Sensor |
| title_fullStr | Air Damping Analysis of a Micro-Coriolis Mass Flow Sensor |
| title_full_unstemmed | Air Damping Analysis of a Micro-Coriolis Mass Flow Sensor |
| title_short | Air Damping Analysis of a Micro-Coriolis Mass Flow Sensor |
| title_sort | air damping analysis of a micro coriolis mass flow sensor |
| topic | Coriolis mass flow sensor resonant sensors mechanical dissipation air damping |
| url | https://www.mdpi.com/1424-8220/22/2/673 |
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