Chemical Vapor Deposition of Uniform and Large-Domain Molybdenum Disulfide Crystals on Glass/Al<sub>2</sub>O<sub>3</sub> Substrates
Two-dimensional molybdenum disulfide (MoS<sub>2</sub>) has attracted significant attention for next-generation electronics, flexible devices, and optical applications. Chemical vapor deposition is the most promising route for the production of large-scale, high-quality MoS<sub>2<...
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MDPI AG
2022-08-01
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| Series: | Nanomaterials |
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| Online Access: | https://www.mdpi.com/2079-4991/12/15/2719 |
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| author | Qingguo Gao Jie Lu Simin Chen Lvcheng Chen Zhequan Xu Dexi Lin Songyi Xu Ping Liu Xueao Zhang Weiwei Cai Chongfu Zhang |
| author_facet | Qingguo Gao Jie Lu Simin Chen Lvcheng Chen Zhequan Xu Dexi Lin Songyi Xu Ping Liu Xueao Zhang Weiwei Cai Chongfu Zhang |
| author_sort | Qingguo Gao |
| collection | DOAJ |
| description | Two-dimensional molybdenum disulfide (MoS<sub>2</sub>) has attracted significant attention for next-generation electronics, flexible devices, and optical applications. Chemical vapor deposition is the most promising route for the production of large-scale, high-quality MoS<sub>2</sub> films. Recently, the chemical vapor deposition of MoS<sub>2</sub> films on soda-lime glass has attracted great attention due to its low cost, fast growth, and large domain size. Typically, a piece of Mo foil or graphite needs to be used as a buffer layer between the glass substrates and the CVD system to prevent the glass substrates from being fragmented. In this study, a novel method was developed for synthesizing MoS<sub>2</sub> on glass substrates. Inert Al<sub>2</sub>O<sub>3</sub> was used as the buffer layer and high-quality, uniform, triangular monolayer MoS<sub>2</sub> crystals with domain sizes larger than 400 μm were obtained. To demonstrate the advantages of glass/Al<sub>2</sub>O<sub>3</sub> substrates, a direct comparison of CVD MoS<sub>2</sub> on glass/Mo and glass/Al<sub>2</sub>O<sub>3</sub> substrates was performed. When Mo foil was used as the buffer layer, serried small bilayer islands and bright core centers could be observed on the MoS<sub>2</sub> domains at the center and edges of glass substrates. As a control, uniform MoS<sub>2</sub> crystals were obtained when Al<sub>2</sub>O<sub>3</sub> was used as the buffer layer, both at the center and the edge of glass substrates. Raman and PL spectra were further characterized to show the merit of glass/Al<sub>2</sub>O<sub>3</sub> substrates. In addition, the thickness of MoS<sub>2</sub> domains was confirmed by an atomic force microscope and the uniformity of MoS<sub>2</sub> domains was verified by Raman mapping. This work provides a novel method for CVD MoS<sub>2</sub> growth on soda-lime glass and is helpful in realizing commercial applications of MoS<sub>2</sub>. |
| first_indexed | 2024-03-09T05:08:14Z |
| format | Article |
| id | doaj.art-8f8e76a55cae458896fcc2b48a0ab44f |
| institution | Directory Open Access Journal |
| issn | 2079-4991 |
| language | English |
| last_indexed | 2024-03-09T05:08:14Z |
| publishDate | 2022-08-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Nanomaterials |
| spelling | doaj.art-8f8e76a55cae458896fcc2b48a0ab44f2023-12-03T12:52:48ZengMDPI AGNanomaterials2079-49912022-08-011215271910.3390/nano12152719Chemical Vapor Deposition of Uniform and Large-Domain Molybdenum Disulfide Crystals on Glass/Al<sub>2</sub>O<sub>3</sub> SubstratesQingguo Gao0Jie Lu1Simin Chen2Lvcheng Chen3Zhequan Xu4Dexi Lin5Songyi Xu6Ping Liu7Xueao Zhang8Weiwei Cai9Chongfu Zhang10School of Electronic Information, University of Electronic Science and Technology of China Zhongshan Institute, Zhongshan 528402, ChinaCollege of Physical Science and Technology, Xiamen University, Xiamen 361005, ChinaSchool of Electronic Information, University of Electronic Science and Technology of China Zhongshan Institute, Zhongshan 528402, ChinaSchool of Electronic Information, University of Electronic Science and Technology of China Zhongshan Institute, Zhongshan 528402, ChinaSchool of Electronic Information, University of Electronic Science and Technology of China Zhongshan Institute, Zhongshan 528402, ChinaSchool of Electronic Information, University of Electronic Science and Technology of China Zhongshan Institute, Zhongshan 528402, ChinaSchool of Electronic Information, University of Electronic Science and Technology of China Zhongshan Institute, Zhongshan 528402, ChinaSchool of Electronic Information, University of Electronic Science and Technology of China Zhongshan Institute, Zhongshan 528402, ChinaCollege of Physical Science and Technology, Xiamen University, Xiamen 361005, ChinaCollege of Physical Science and Technology, Xiamen University, Xiamen 361005, ChinaSchool of Electronic Information, University of Electronic Science and Technology of China Zhongshan Institute, Zhongshan 528402, ChinaTwo-dimensional molybdenum disulfide (MoS<sub>2</sub>) has attracted significant attention for next-generation electronics, flexible devices, and optical applications. Chemical vapor deposition is the most promising route for the production of large-scale, high-quality MoS<sub>2</sub> films. Recently, the chemical vapor deposition of MoS<sub>2</sub> films on soda-lime glass has attracted great attention due to its low cost, fast growth, and large domain size. Typically, a piece of Mo foil or graphite needs to be used as a buffer layer between the glass substrates and the CVD system to prevent the glass substrates from being fragmented. In this study, a novel method was developed for synthesizing MoS<sub>2</sub> on glass substrates. Inert Al<sub>2</sub>O<sub>3</sub> was used as the buffer layer and high-quality, uniform, triangular monolayer MoS<sub>2</sub> crystals with domain sizes larger than 400 μm were obtained. To demonstrate the advantages of glass/Al<sub>2</sub>O<sub>3</sub> substrates, a direct comparison of CVD MoS<sub>2</sub> on glass/Mo and glass/Al<sub>2</sub>O<sub>3</sub> substrates was performed. When Mo foil was used as the buffer layer, serried small bilayer islands and bright core centers could be observed on the MoS<sub>2</sub> domains at the center and edges of glass substrates. As a control, uniform MoS<sub>2</sub> crystals were obtained when Al<sub>2</sub>O<sub>3</sub> was used as the buffer layer, both at the center and the edge of glass substrates. Raman and PL spectra were further characterized to show the merit of glass/Al<sub>2</sub>O<sub>3</sub> substrates. In addition, the thickness of MoS<sub>2</sub> domains was confirmed by an atomic force microscope and the uniformity of MoS<sub>2</sub> domains was verified by Raman mapping. This work provides a novel method for CVD MoS<sub>2</sub> growth on soda-lime glass and is helpful in realizing commercial applications of MoS<sub>2</sub>.https://www.mdpi.com/2079-4991/12/15/2719MoS<sub>2</sub>chemical vapor depositionsubstrateglass |
| spellingShingle | Qingguo Gao Jie Lu Simin Chen Lvcheng Chen Zhequan Xu Dexi Lin Songyi Xu Ping Liu Xueao Zhang Weiwei Cai Chongfu Zhang Chemical Vapor Deposition of Uniform and Large-Domain Molybdenum Disulfide Crystals on Glass/Al<sub>2</sub>O<sub>3</sub> Substrates Nanomaterials MoS<sub>2</sub> chemical vapor deposition substrate glass |
| title | Chemical Vapor Deposition of Uniform and Large-Domain Molybdenum Disulfide Crystals on Glass/Al<sub>2</sub>O<sub>3</sub> Substrates |
| title_full | Chemical Vapor Deposition of Uniform and Large-Domain Molybdenum Disulfide Crystals on Glass/Al<sub>2</sub>O<sub>3</sub> Substrates |
| title_fullStr | Chemical Vapor Deposition of Uniform and Large-Domain Molybdenum Disulfide Crystals on Glass/Al<sub>2</sub>O<sub>3</sub> Substrates |
| title_full_unstemmed | Chemical Vapor Deposition of Uniform and Large-Domain Molybdenum Disulfide Crystals on Glass/Al<sub>2</sub>O<sub>3</sub> Substrates |
| title_short | Chemical Vapor Deposition of Uniform and Large-Domain Molybdenum Disulfide Crystals on Glass/Al<sub>2</sub>O<sub>3</sub> Substrates |
| title_sort | chemical vapor deposition of uniform and large domain molybdenum disulfide crystals on glass al sub 2 sub o sub 3 sub substrates |
| topic | MoS<sub>2</sub> chemical vapor deposition substrate glass |
| url | https://www.mdpi.com/2079-4991/12/15/2719 |
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