Inverse procedure for measuring piezoelectric material parameters using a single multi-electrode sample

<p>An inverse measurement procedure for the determination of a full set of piezoelectric material parameters using a single sample is presented. The basis for the measurement procedure is a measurement of the frequency-dependent impedance of the sample. To yield sufficient sensitivity of this...

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Bibliographic Details
Main Authors: L. Claes, N. Feldmann, V. Schulze, L. Meihost, H. Kuhlmann, B. Jurgelucks, A. Walther, B. Henning
Format: Article
Language:English
Published: Copernicus Publications 2023-05-01
Series:Journal of Sensors and Sensor Systems
Online Access:https://jsss.copernicus.org/articles/12/163/2023/jsss-12-163-2023.pdf