| Summary: | AlCrTiZrMo high-entropy alloy (HEA) films with strong amorphization were obtained by co-filter cathode vacuum arc deposition, and the effect of thermal shock on the films was investigated in order to explore the protection mechanism of HEA films against mechanical components in extreme service environments. The results show that after annealing at 800 °C for 1 h, the formation of a dense ZrTiO<sub>4</sub> composite oxide layer on the surface actively prevents the oxidation from continuing, so that the AlCrTiZrMo HEA film exhibits excellent oxidation resistance at 800 °C in air. In the friction-corrosion coupling environment, the AlCrTiZrMo HEA film annealed at 800 °C for 1 h shows the best tribocorrosion resistance due to the stable dense microstructure and excellent mechanical properties, and its ΔOCP, COF and wear rate possess the smallest values of 0.055, 0.04 and 1.34 × 10<sup>−6</sup> mm<sup>−3</sup>·N<sup>−1</sup>·m<sup>−1</sup>.
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