Movement Control Method of Magnetic Levitation System Using Eccentricity of Non-Contact Position Sensor
This paper presents a method of utilizing a non-contact position sensor for the tilting and movement control of a rotor in a rotary magnetic levitation motor system. This system has been studied with the aim of having a relatively simple and highly clean alternative application compared to the spin...
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MDPI AG
2021-03-01
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Online Access: | https://www.mdpi.com/2076-3417/11/5/2396 |
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author | Jong Suk Lim Hyung-Woo Lee |
author_facet | Jong Suk Lim Hyung-Woo Lee |
author_sort | Jong Suk Lim |
collection | DOAJ |
description | This paper presents a method of utilizing a non-contact position sensor for the tilting and movement control of a rotor in a rotary magnetic levitation motor system. This system has been studied with the aim of having a relatively simple and highly clean alternative application compared to the spin coater used in the photoresist coating process in the semiconductor wafer process. To eliminate system wear and dust problems, a shaft-and-bearing-free magnetic levitation motor system was designed and a minimal non-contact position sensor was placed. An algorithm capable of preventing derailment and precise movement control by applying only control without additional mechanical devices to this magnetic levitation system was proposed. The proposed algorithm was verified through simulations and experiments, and the validity of the algorithm was verified by deriving a precision control result suitable for the movement control command in units of 0.1 mm at 50 rpm rotation drive. |
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format | Article |
id | doaj.art-8ffc61a21cad42338f3b8901b7646fde |
institution | Directory Open Access Journal |
issn | 2076-3417 |
language | English |
last_indexed | 2024-03-09T05:00:14Z |
publishDate | 2021-03-01 |
publisher | MDPI AG |
record_format | Article |
series | Applied Sciences |
spelling | doaj.art-8ffc61a21cad42338f3b8901b7646fde2023-12-03T13:01:03ZengMDPI AGApplied Sciences2076-34172021-03-01115239610.3390/app11052396Movement Control Method of Magnetic Levitation System Using Eccentricity of Non-Contact Position SensorJong Suk Lim0Hyung-Woo Lee1Department of Railway Vehicle System Engineering, Korea National University of Transportation, P.O. Box 16106, 157 Cheoldobangmulgwan-ro, Uiwang-si 16106, KoreaDepartment of Railway Vehicle System Engineering, Korea National University of Transportation, P.O. Box 16106, 157 Cheoldobangmulgwan-ro, Uiwang-si 16106, KoreaThis paper presents a method of utilizing a non-contact position sensor for the tilting and movement control of a rotor in a rotary magnetic levitation motor system. This system has been studied with the aim of having a relatively simple and highly clean alternative application compared to the spin coater used in the photoresist coating process in the semiconductor wafer process. To eliminate system wear and dust problems, a shaft-and-bearing-free magnetic levitation motor system was designed and a minimal non-contact position sensor was placed. An algorithm capable of preventing derailment and precise movement control by applying only control without additional mechanical devices to this magnetic levitation system was proposed. The proposed algorithm was verified through simulations and experiments, and the validity of the algorithm was verified by deriving a precision control result suitable for the movement control command in units of 0.1 mm at 50 rpm rotation drive.https://www.mdpi.com/2076-3417/11/5/2396six degrees of freedomlevitationmovement controlnon-contact position sensormotor system |
spellingShingle | Jong Suk Lim Hyung-Woo Lee Movement Control Method of Magnetic Levitation System Using Eccentricity of Non-Contact Position Sensor Applied Sciences six degrees of freedom levitation movement control non-contact position sensor motor system |
title | Movement Control Method of Magnetic Levitation System Using Eccentricity of Non-Contact Position Sensor |
title_full | Movement Control Method of Magnetic Levitation System Using Eccentricity of Non-Contact Position Sensor |
title_fullStr | Movement Control Method of Magnetic Levitation System Using Eccentricity of Non-Contact Position Sensor |
title_full_unstemmed | Movement Control Method of Magnetic Levitation System Using Eccentricity of Non-Contact Position Sensor |
title_short | Movement Control Method of Magnetic Levitation System Using Eccentricity of Non-Contact Position Sensor |
title_sort | movement control method of magnetic levitation system using eccentricity of non contact position sensor |
topic | six degrees of freedom levitation movement control non-contact position sensor motor system |
url | https://www.mdpi.com/2076-3417/11/5/2396 |
work_keys_str_mv | AT jongsuklim movementcontrolmethodofmagneticlevitationsystemusingeccentricityofnoncontactpositionsensor AT hyungwoolee movementcontrolmethodofmagneticlevitationsystemusingeccentricityofnoncontactpositionsensor |