On-chip wavelength division multiplexing filters using extremely efficient gate-driven silicon microring resonator array

Abstract Silicon microring resonators (Si-MRRs) play essential roles in on-chip wavelength division multiplexing (WDM) systems due to their ultra-compact size and low energy consumption. However, the resonant wavelength of Si-MRRs is very sensitive to temperature fluctuations and fabrication process...

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Main Authors: Wei-Che Hsu, Nabila Nujhat, Benjamin Kupp, John F. Conley, Alan X. Wang
Format: Article
Language:English
Published: Nature Portfolio 2023-03-01
Series:Scientific Reports
Online Access:https://doi.org/10.1038/s41598-023-32313-0
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author Wei-Che Hsu
Nabila Nujhat
Benjamin Kupp
John F. Conley
Alan X. Wang
author_facet Wei-Che Hsu
Nabila Nujhat
Benjamin Kupp
John F. Conley
Alan X. Wang
author_sort Wei-Che Hsu
collection DOAJ
description Abstract Silicon microring resonators (Si-MRRs) play essential roles in on-chip wavelength division multiplexing (WDM) systems due to their ultra-compact size and low energy consumption. However, the resonant wavelength of Si-MRRs is very sensitive to temperature fluctuations and fabrication process variation. Typically, each Si-MRR in the WDM system requires precise wavelength control by free carrier injection using PIN diodes or thermal heaters that consume high power. This work experimentally demonstrates gate-tuning on-chip WDM filters for the first time with large wavelength coverage for the entire channel spacing using a Si-MRR array driven by high mobility titanium-doped indium oxide (ITiO) gates. The integrated Si-MRRs achieve unprecedented wavelength tunability up to 589 pm/V, or VπL of 0.050 V cm with a high-quality factor of 5200. The on-chip WDM filters, which consist of four cascaded ITiO-driven Si-MRRs, can be continuously tuned across the 1543–1548 nm wavelength range by gate biases with near-zero power consumption.
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spelling doaj.art-90c6f37e655141bd90f3e67ea44b4be92023-04-03T05:27:50ZengNature PortfolioScientific Reports2045-23222023-03-011311710.1038/s41598-023-32313-0On-chip wavelength division multiplexing filters using extremely efficient gate-driven silicon microring resonator arrayWei-Che Hsu0Nabila Nujhat1Benjamin Kupp2John F. Conley3Alan X. Wang4School of Electrical Engineering and Computer Science, Oregon State UniversitySchool of Electrical Engineering and Computer Science, Oregon State UniversitySchool of Electrical Engineering and Computer Science, Oregon State UniversitySchool of Electrical Engineering and Computer Science, Oregon State UniversitySchool of Electrical Engineering and Computer Science, Oregon State UniversityAbstract Silicon microring resonators (Si-MRRs) play essential roles in on-chip wavelength division multiplexing (WDM) systems due to their ultra-compact size and low energy consumption. However, the resonant wavelength of Si-MRRs is very sensitive to temperature fluctuations and fabrication process variation. Typically, each Si-MRR in the WDM system requires precise wavelength control by free carrier injection using PIN diodes or thermal heaters that consume high power. This work experimentally demonstrates gate-tuning on-chip WDM filters for the first time with large wavelength coverage for the entire channel spacing using a Si-MRR array driven by high mobility titanium-doped indium oxide (ITiO) gates. The integrated Si-MRRs achieve unprecedented wavelength tunability up to 589 pm/V, or VπL of 0.050 V cm with a high-quality factor of 5200. The on-chip WDM filters, which consist of four cascaded ITiO-driven Si-MRRs, can be continuously tuned across the 1543–1548 nm wavelength range by gate biases with near-zero power consumption.https://doi.org/10.1038/s41598-023-32313-0
spellingShingle Wei-Che Hsu
Nabila Nujhat
Benjamin Kupp
John F. Conley
Alan X. Wang
On-chip wavelength division multiplexing filters using extremely efficient gate-driven silicon microring resonator array
Scientific Reports
title On-chip wavelength division multiplexing filters using extremely efficient gate-driven silicon microring resonator array
title_full On-chip wavelength division multiplexing filters using extremely efficient gate-driven silicon microring resonator array
title_fullStr On-chip wavelength division multiplexing filters using extremely efficient gate-driven silicon microring resonator array
title_full_unstemmed On-chip wavelength division multiplexing filters using extremely efficient gate-driven silicon microring resonator array
title_short On-chip wavelength division multiplexing filters using extremely efficient gate-driven silicon microring resonator array
title_sort on chip wavelength division multiplexing filters using extremely efficient gate driven silicon microring resonator array
url https://doi.org/10.1038/s41598-023-32313-0
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