Traceably calibrated scanning Hall probe microscopy at room temperature
<p>Fabrication, characterization and comparison of gold and graphene micro- and nanoscale Hall sensors for room temperature scanning magnetic field microscopy applications are presented. The Hall sensors with active areas from 5 <span class="inline-formula">µ</spa...
| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Copernicus Publications
2020-11-01
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| Series: | Journal of Sensors and Sensor Systems |
| Online Access: | https://jsss.copernicus.org/articles/9/391/2020/jsss-9-391-2020.pdf |
| _version_ | 1818263161255493632 |
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| author | M. Gerken A. Solignac D. Momeni Pakdehi A. Manzin T. Weimann K. Pierz S. Sievers H. W. Schumacher |
| author_facet | M. Gerken A. Solignac D. Momeni Pakdehi A. Manzin T. Weimann K. Pierz S. Sievers H. W. Schumacher |
| author_sort | M. Gerken |
| collection | DOAJ |
| description | <p>Fabrication, characterization and comparison of gold and
graphene micro- and nanoscale Hall sensors for room temperature scanning
magnetic field microscopy applications are presented. The Hall sensors with
active areas from 5 <span class="inline-formula">µ</span>m down to 50 nm were fabricated by electron-beam
lithography. The calibration of the Hall sensors in an external magnetic
field revealed a sensitivity of 3.2 mV A<span class="inline-formula"><sup>−1</sup></span> T<span class="inline-formula"><sup>−1</sup></span> <span class="inline-formula">±</span> 0.3 %
for gold and 1615 V A<span class="inline-formula"><sup>−1 </sup></span> T<span class="inline-formula"><sup>−1</sup></span> <span class="inline-formula">±</span> 0.5 % for graphene at room
temperature. The gold sensors were fabricated on silicon nitride cantilever
chips suitable for integration into commercial scanning probe microscopes,
allowing scanning Hall microscopy (SHM) under ambient conditions and
controlled sensor–sample distance. The height-dependent stray field
distribution of a magnetic scale was characterized using a 5 <span class="inline-formula">µ</span>m gold
Hall sensor. The uncertainty of the entire Hall-sensor-based scanning and
data acquisition process was analyzed, allowing traceably calibrated SHM
measurements. The measurement results show good agreement with numerical
simulations within the uncertainty budget.</p> |
| first_indexed | 2024-12-12T19:14:37Z |
| format | Article |
| id | doaj.art-912dd89d64754d9b8e05929672515f40 |
| institution | Directory Open Access Journal |
| issn | 2194-8771 2194-878X |
| language | English |
| last_indexed | 2024-12-12T19:14:37Z |
| publishDate | 2020-11-01 |
| publisher | Copernicus Publications |
| record_format | Article |
| series | Journal of Sensors and Sensor Systems |
| spelling | doaj.art-912dd89d64754d9b8e05929672515f402022-12-22T00:14:45ZengCopernicus PublicationsJournal of Sensors and Sensor Systems2194-87712194-878X2020-11-01939139910.5194/jsss-9-391-2020Traceably calibrated scanning Hall probe microscopy at room temperatureM. Gerken0A. Solignac1D. Momeni Pakdehi2A. Manzin3T. Weimann4K. Pierz5S. Sievers6H. W. Schumacher7Physikalisch-Technische Bundesanstalt (PTB), Bundesallee 100, 38116 Braunschweig, GermanySPEC, CEA, CNRS, Université Paris-Saclay, CEA Saclay, 91191 Gif-sur-Yvette, CEDEX, FrancePhysikalisch-Technische Bundesanstalt (PTB), Bundesallee 100, 38116 Braunschweig, GermanyIstituto Nazionale di Ricerca Metrologica, 10135 Turin, ItalyPhysikalisch-Technische Bundesanstalt (PTB), Bundesallee 100, 38116 Braunschweig, GermanyPhysikalisch-Technische Bundesanstalt (PTB), Bundesallee 100, 38116 Braunschweig, GermanyPhysikalisch-Technische Bundesanstalt (PTB), Bundesallee 100, 38116 Braunschweig, GermanyPhysikalisch-Technische Bundesanstalt (PTB), Bundesallee 100, 38116 Braunschweig, Germany<p>Fabrication, characterization and comparison of gold and graphene micro- and nanoscale Hall sensors for room temperature scanning magnetic field microscopy applications are presented. The Hall sensors with active areas from 5 <span class="inline-formula">µ</span>m down to 50 nm were fabricated by electron-beam lithography. The calibration of the Hall sensors in an external magnetic field revealed a sensitivity of 3.2 mV A<span class="inline-formula"><sup>−1</sup></span> T<span class="inline-formula"><sup>−1</sup></span> <span class="inline-formula">±</span> 0.3 % for gold and 1615 V A<span class="inline-formula"><sup>−1 </sup></span> T<span class="inline-formula"><sup>−1</sup></span> <span class="inline-formula">±</span> 0.5 % for graphene at room temperature. The gold sensors were fabricated on silicon nitride cantilever chips suitable for integration into commercial scanning probe microscopes, allowing scanning Hall microscopy (SHM) under ambient conditions and controlled sensor–sample distance. The height-dependent stray field distribution of a magnetic scale was characterized using a 5 <span class="inline-formula">µ</span>m gold Hall sensor. The uncertainty of the entire Hall-sensor-based scanning and data acquisition process was analyzed, allowing traceably calibrated SHM measurements. The measurement results show good agreement with numerical simulations within the uncertainty budget.</p>https://jsss.copernicus.org/articles/9/391/2020/jsss-9-391-2020.pdf |
| spellingShingle | M. Gerken A. Solignac D. Momeni Pakdehi A. Manzin T. Weimann K. Pierz S. Sievers H. W. Schumacher Traceably calibrated scanning Hall probe microscopy at room temperature Journal of Sensors and Sensor Systems |
| title | Traceably calibrated scanning Hall probe microscopy at room temperature |
| title_full | Traceably calibrated scanning Hall probe microscopy at room temperature |
| title_fullStr | Traceably calibrated scanning Hall probe microscopy at room temperature |
| title_full_unstemmed | Traceably calibrated scanning Hall probe microscopy at room temperature |
| title_short | Traceably calibrated scanning Hall probe microscopy at room temperature |
| title_sort | traceably calibrated scanning hall probe microscopy at room temperature |
| url | https://jsss.copernicus.org/articles/9/391/2020/jsss-9-391-2020.pdf |
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