Development of a Highly Sensitive and Stable Flexible Temperature Sensor Based on All‐Inorganic Mn–Co–Ni–O Thin Films

Abstract Despite the fact that flexible temperature sensors, which can be mechanically deformed, are used for the fabrication of next‐generation smart electronics over the past few years, the improvement in their sensitivity and stability remains a major challenge. Along these lines, in this work, a...

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Main Authors: Yuxian Song, Shuo Wang, Bo Gao, Aimin Chang, Wenwen Kong
Format: Article
Language:English
Published: Wiley-VCH 2023-03-01
Series:Advanced Materials Interfaces
Subjects:
Online Access:https://doi.org/10.1002/admi.202202274
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author Yuxian Song
Shuo Wang
Bo Gao
Aimin Chang
Wenwen Kong
author_facet Yuxian Song
Shuo Wang
Bo Gao
Aimin Chang
Wenwen Kong
author_sort Yuxian Song
collection DOAJ
description Abstract Despite the fact that flexible temperature sensors, which can be mechanically deformed, are used for the fabrication of next‐generation smart electronics over the past few years, the improvement in their sensitivity and stability remains a major challenge. Along these lines, in this work, an all‐inorganic flexible temperature sensor consisting of MnCoNiO (MCNO) spinel structural ceramics film and a flexible 40 µm‐thick mica substrate is fabricated. By precisely controlling the production process, the pure spinel phase MCNO/mica films with low defect density can be obtained. In addition, the activation energy of the proposed flexible ceramic temperature sensor film remains stable in the natural bending state and at radii of curvature of 10, 15, and 20 mm, respectively, accordingly, B25/50 is relatively stable around the range of 3450–3550 K. Meanwhile, its sensitivity temperature coefficient of resistance value reaches −3.9% °C−1. More specifically, ΔB25/50 is less than 1.83%, 1.57%, and 1.32% after thermal shock, application of the bending cycle, and vibration, respectively. The superior performance of this all‐inorganic ceramic film is due to the excellent bonding between the film and the substrate. This work provides an alternative approach to exploit the development of the next‐generation high‐sensitivity flexible electronic devices.
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spelling doaj.art-913ad4933eff47af8f02e1e4944a0c5d2023-07-26T01:36:15ZengWiley-VCHAdvanced Materials Interfaces2196-73502023-03-01108n/an/a10.1002/admi.202202274Development of a Highly Sensitive and Stable Flexible Temperature Sensor Based on All‐Inorganic Mn–Co–Ni–O Thin FilmsYuxian Song0Shuo Wang1Bo Gao2Aimin Chang3Wenwen Kong4Key Laboratory of Functional Materials and Devices for Special Environments of CAS Xinjiang Key Laboratory of Electronic Information Materials and Devices Xinjiang Technical Institute of Physics and Chemistry of CAS Urumqi 830011 ChinaKey Laboratory of Functional Materials and Devices for Special Environments of CAS Xinjiang Key Laboratory of Electronic Information Materials and Devices Xinjiang Technical Institute of Physics and Chemistry of CAS Urumqi 830011 ChinaKey Laboratory of Functional Materials and Devices for Special Environments of CAS Xinjiang Key Laboratory of Electronic Information Materials and Devices Xinjiang Technical Institute of Physics and Chemistry of CAS Urumqi 830011 ChinaKey Laboratory of Functional Materials and Devices for Special Environments of CAS Xinjiang Key Laboratory of Electronic Information Materials and Devices Xinjiang Technical Institute of Physics and Chemistry of CAS Urumqi 830011 ChinaKey Laboratory of Functional Materials and Devices for Special Environments of CAS Xinjiang Key Laboratory of Electronic Information Materials and Devices Xinjiang Technical Institute of Physics and Chemistry of CAS Urumqi 830011 ChinaAbstract Despite the fact that flexible temperature sensors, which can be mechanically deformed, are used for the fabrication of next‐generation smart electronics over the past few years, the improvement in their sensitivity and stability remains a major challenge. Along these lines, in this work, an all‐inorganic flexible temperature sensor consisting of MnCoNiO (MCNO) spinel structural ceramics film and a flexible 40 µm‐thick mica substrate is fabricated. By precisely controlling the production process, the pure spinel phase MCNO/mica films with low defect density can be obtained. In addition, the activation energy of the proposed flexible ceramic temperature sensor film remains stable in the natural bending state and at radii of curvature of 10, 15, and 20 mm, respectively, accordingly, B25/50 is relatively stable around the range of 3450–3550 K. Meanwhile, its sensitivity temperature coefficient of resistance value reaches −3.9% °C−1. More specifically, ΔB25/50 is less than 1.83%, 1.57%, and 1.32% after thermal shock, application of the bending cycle, and vibration, respectively. The superior performance of this all‐inorganic ceramic film is due to the excellent bonding between the film and the substrate. This work provides an alternative approach to exploit the development of the next‐generation high‐sensitivity flexible electronic devices.https://doi.org/10.1002/admi.202202274flexible temperature sensorMn–Co–Ni–O (MCNO)sensitivestable
spellingShingle Yuxian Song
Shuo Wang
Bo Gao
Aimin Chang
Wenwen Kong
Development of a Highly Sensitive and Stable Flexible Temperature Sensor Based on All‐Inorganic Mn–Co–Ni–O Thin Films
Advanced Materials Interfaces
flexible temperature sensor
Mn–Co–Ni–O (MCNO)
sensitive
stable
title Development of a Highly Sensitive and Stable Flexible Temperature Sensor Based on All‐Inorganic Mn–Co–Ni–O Thin Films
title_full Development of a Highly Sensitive and Stable Flexible Temperature Sensor Based on All‐Inorganic Mn–Co–Ni–O Thin Films
title_fullStr Development of a Highly Sensitive and Stable Flexible Temperature Sensor Based on All‐Inorganic Mn–Co–Ni–O Thin Films
title_full_unstemmed Development of a Highly Sensitive and Stable Flexible Temperature Sensor Based on All‐Inorganic Mn–Co–Ni–O Thin Films
title_short Development of a Highly Sensitive and Stable Flexible Temperature Sensor Based on All‐Inorganic Mn–Co–Ni–O Thin Films
title_sort development of a highly sensitive and stable flexible temperature sensor based on all inorganic mn co ni o thin films
topic flexible temperature sensor
Mn–Co–Ni–O (MCNO)
sensitive
stable
url https://doi.org/10.1002/admi.202202274
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