Simple and Efficient Non-Contact Method for Measuring the Surface of a Large Aspheric Mirror
A non-contact measurement method for measuring large aspheric surfaces with a laser tracker is proposed. Using an air-bearing probe eliminates the need to contact the optical surface and improves measurement efficiency and accuracy. Using this method, we measured the surface of an aspheric mirror 3...
Main Authors: | , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2022-09-01
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Series: | Applied Sciences |
Subjects: | |
Online Access: | https://www.mdpi.com/2076-3417/12/19/9666 |
Summary: | A non-contact measurement method for measuring large aspheric surfaces with a laser tracker is proposed. Using an air-bearing probe eliminates the need to contact the optical surface and improves measurement efficiency and accuracy. Using this method, we measured the surface of an aspheric mirror 3 m in diameter and 13.6 m in the radius of curvature. The preliminary experimental result indicates that the error of surface measurement is 0.8 μm (RMS). |
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ISSN: | 2076-3417 |