Simple and Efficient Non-Contact Method for Measuring the Surface of a Large Aspheric Mirror

A non-contact measurement method for measuring large aspheric surfaces with a laser tracker is proposed. Using an air-bearing probe eliminates the need to contact the optical surface and improves measurement efficiency and accuracy. Using this method, we measured the surface of an aspheric mirror 3...

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Bibliographic Details
Main Authors: Jie Li, Jie Yang, Lin Chen
Format: Article
Language:English
Published: MDPI AG 2022-09-01
Series:Applied Sciences
Subjects:
Online Access:https://www.mdpi.com/2076-3417/12/19/9666
Description
Summary:A non-contact measurement method for measuring large aspheric surfaces with a laser tracker is proposed. Using an air-bearing probe eliminates the need to contact the optical surface and improves measurement efficiency and accuracy. Using this method, we measured the surface of an aspheric mirror 3 m in diameter and 13.6 m in the radius of curvature. The preliminary experimental result indicates that the error of surface measurement is 0.8 μm (RMS).
ISSN:2076-3417