Simple and Efficient Non-Contact Method for Measuring the Surface of a Large Aspheric Mirror
A non-contact measurement method for measuring large aspheric surfaces with a laser tracker is proposed. Using an air-bearing probe eliminates the need to contact the optical surface and improves measurement efficiency and accuracy. Using this method, we measured the surface of an aspheric mirror 3...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2022-09-01
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| Series: | Applied Sciences |
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| Online Access: | https://www.mdpi.com/2076-3417/12/19/9666 |
| _version_ | 1827655280137076736 |
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| author | Jie Li Jie Yang Lin Chen |
| author_facet | Jie Li Jie Yang Lin Chen |
| author_sort | Jie Li |
| collection | DOAJ |
| description | A non-contact measurement method for measuring large aspheric surfaces with a laser tracker is proposed. Using an air-bearing probe eliminates the need to contact the optical surface and improves measurement efficiency and accuracy. Using this method, we measured the surface of an aspheric mirror 3 m in diameter and 13.6 m in the radius of curvature. The preliminary experimental result indicates that the error of surface measurement is 0.8 μm (RMS). |
| first_indexed | 2024-03-09T22:04:38Z |
| format | Article |
| id | doaj.art-91439861b91b45bdb563fbf8fa4ffd33 |
| institution | Directory Open Access Journal |
| issn | 2076-3417 |
| language | English |
| last_indexed | 2024-03-09T22:04:38Z |
| publishDate | 2022-09-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Applied Sciences |
| spelling | doaj.art-91439861b91b45bdb563fbf8fa4ffd332023-11-23T19:43:29ZengMDPI AGApplied Sciences2076-34172022-09-011219966610.3390/app12199666Simple and Efficient Non-Contact Method for Measuring the Surface of a Large Aspheric MirrorJie Li0Jie Yang1Lin Chen2 Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, ChinaA non-contact measurement method for measuring large aspheric surfaces with a laser tracker is proposed. Using an air-bearing probe eliminates the need to contact the optical surface and improves measurement efficiency and accuracy. Using this method, we measured the surface of an aspheric mirror 3 m in diameter and 13.6 m in the radius of curvature. The preliminary experimental result indicates that the error of surface measurement is 0.8 μm (RMS).https://www.mdpi.com/2076-3417/12/19/9666optical metrologylaser trackerlarge-scale measurementnon-contact measurement |
| spellingShingle | Jie Li Jie Yang Lin Chen Simple and Efficient Non-Contact Method for Measuring the Surface of a Large Aspheric Mirror Applied Sciences optical metrology laser tracker large-scale measurement non-contact measurement |
| title | Simple and Efficient Non-Contact Method for Measuring the Surface of a Large Aspheric Mirror |
| title_full | Simple and Efficient Non-Contact Method for Measuring the Surface of a Large Aspheric Mirror |
| title_fullStr | Simple and Efficient Non-Contact Method for Measuring the Surface of a Large Aspheric Mirror |
| title_full_unstemmed | Simple and Efficient Non-Contact Method for Measuring the Surface of a Large Aspheric Mirror |
| title_short | Simple and Efficient Non-Contact Method for Measuring the Surface of a Large Aspheric Mirror |
| title_sort | simple and efficient non contact method for measuring the surface of a large aspheric mirror |
| topic | optical metrology laser tracker large-scale measurement non-contact measurement |
| url | https://www.mdpi.com/2076-3417/12/19/9666 |
| work_keys_str_mv | AT jieli simpleandefficientnoncontactmethodformeasuringthesurfaceofalargeasphericmirror AT jieyang simpleandefficientnoncontactmethodformeasuringthesurfaceofalargeasphericmirror AT linchen simpleandefficientnoncontactmethodformeasuringthesurfaceofalargeasphericmirror |