Technology for cleaning glass substrates in glow discharge plasma for microfluidics applications
The production of microfluidic chips is increasing every year because the technology using the chip allows you to make an express test to obtain the analysis, as well as economically viable. Often microfluidic chips are based on glass in which the microchannels are formed. Accurate production of a m...
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| Format: | Article |
| Language: | English |
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EDP Sciences
2023-01-01
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| Series: | E3S Web of Conferences |
| Online Access: | https://www.e3s-conferences.org/articles/e3sconf/pdf/2023/50/e3sconf_interagromash2023_02001.pdf |