Effect of Plasma-Enhanced Atomic Layer Deposition on Oxygen Overabundance and Its Influence on the Morphological, Optical, Structural, and Mechanical Properties of Al-Doped TiO<sub>2</sub> Coating

Effect of Plasma-Enhanced Atomic Layer Deposition on Oxygen Overabundance and Its Influence on the Morphological, Optical, Structural, and Mechanical Properties of Al-Doped TiO<sub>2</sub> Coating

The chemical, structural, morphological, and optical properties of Al-doped TiO<sub>2</sub> thin films, called TiO<sub>2</sub>/Al<sub>2</sub>O<sub>3</sub> nanolaminates, grown by plasma-enhanced atomic layer deposition (PEALD) on p-type Si <100>...

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Bibliographic Details
Main Authors: William Chiappim, Giorgio Testoni, Felipe Miranda, Mariana Fraga, Humber Furlan, David Ardiles Saravia, Argemiro da Silva Sobrinho, Gilberto Petraconi, Homero Maciel, Rodrigo Pessoa
Format: Article
Language:English
Published: MDPI AG 2021-05-01
Series:Micromachines
Subjects:
plasma-enhanced atomic layer deposition
titanium dioxide
aluminum oxide
nanolaminates
superstoichiometry
doping
Online Access:https://www.mdpi.com/2072-666X/12/6/588

Internet

https://www.mdpi.com/2072-666X/12/6/588

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