Anodically Bonded Photoacoustic Transducer: An Approach towards Wafer-Level Optical Gas Sensors

Anodically Bonded Photoacoustic Transducer: An Approach towards Wafer-Level Optical Gas Sensors

We present a concept for a wafer-level manufactured photoacoustic transducer, suitable to be used in consumer-grade gas sensors. The transducer consists of an anodically bonded two-layer stack of a blank silicon wafer and an 11 µm membrane, which was wet-etched from a borosilicate wafer. The membran...

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Bibliographic Details
Main Authors: Simon Gassner, Rainer Schaller, Matthias Eberl, Carsten von Koblinski, Simon Essing, Mohammadamir Ghaderi, Katrin Schmitt, Jürgen Wöllenstein
Format: Article
Language:English
Published: MDPI AG 2022-01-01
Series:Sensors
Subjects:
gas sensor
photoacoustic
pressure transducer
wafer-level
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Online Access:https://www.mdpi.com/1424-8220/22/2/685

Internet

https://www.mdpi.com/1424-8220/22/2/685

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