Anodically Bonded Photoacoustic Transducer: An Approach towards Wafer-Level Optical Gas Sensors
We present a concept for a wafer-level manufactured photoacoustic transducer, suitable to be used in consumer-grade gas sensors. The transducer consists of an anodically bonded two-layer stack of a blank silicon wafer and an 11 µm membrane, which was wet-etched from a borosilicate wafer. The membran...
Main Authors: | Simon Gassner, Rainer Schaller, Matthias Eberl, Carsten von Koblinski, Simon Essing, Mohammadamir Ghaderi, Katrin Schmitt, Jürgen Wöllenstein |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2022-01-01
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Series: | Sensors |
Subjects: | |
Online Access: | https://www.mdpi.com/1424-8220/22/2/685 |
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