Optical Properties of a-SiC:H Films Deposited by Glowdischarge Methods

Optical Properties of a-SiC:H Films Deposited by Glowdischarge Methods

he optical properties of amorphous silicon carbon films deposited by glowdischarge method have been studied using ultra violet-visible (uv-vis) spectroscopy. The refractive index was calculated by Swanepoel’s formula using transmission data then followed by numerical simulation. The films density te...

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Bibliographic Details
Main Authors:	Lusitra Munisa, Dewi Marianty, Rosari Saleh
Format:	Article
Language:	English
Published:	Universitas Indonesia 2003-12-01
Series:	Makara Seri Sains
Subjects:	optical properties amorphous silicon carbon glowdischarge
Online Access:	http://journal.ui.ac.id/science/article/view/372/368

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