Extraction of Device Structural Parameters Through DC/AC Performance Using an MLP Neural Network Algorithm

Extraction of Device Structural Parameters Through DC/AC Performance Using an MLP Neural Network Algorithm

We proposed a neural network (NN) approach that uses two multi-layer perceptron (MLP) NNs an encoder and a decoder to estimate the structural parameter (S<sub>para</sub>) of a 14-nm node fully depleted silicon on insulator (FDSOI) field-effect transistor (FET). When outputs defined by th...

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Bibliographic Details
Main Authors: Hyundong Jang, Hyeok Yun, Chanyang Park, Kyeongrae Cho, Kihoon Nam, Jun-Sik Yoon, Hyun-Chul Choi, Rock-Hyun Baek
Format: Article
Language:English
Published: IEEE 2022-01-01
Series:IEEE Access
Subjects:
Device design
device structural parameters
FDSOI FET
figure-of-merits
machine learning
manufacturing process
Online Access:https://ieeexplore.ieee.org/document/9799705/

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