Bio-Inspired Hierarchical Micro-/Nanostructures for Anti-Icing Solely Fabricated by Metal-Assisted Chemical Etching

We report a cost-effective and scalable methodology for producing a hierarchical micro-/nanostructured silicon surface solely by metal-assisted chemical etching. It involves two major processing steps of fabricating micropillars and nanowires separately. The process of producing micro-scale structur...

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Main Authors: Lansheng Zhang, Xiaoyang Chu, Feng Tian, Yang Xu, Huan Hu
Format: Article
Language:English
Published: MDPI AG 2022-07-01
Series:Micromachines
Subjects:
Online Access:https://www.mdpi.com/2072-666X/13/7/1077
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author Lansheng Zhang
Xiaoyang Chu
Feng Tian
Yang Xu
Huan Hu
author_facet Lansheng Zhang
Xiaoyang Chu
Feng Tian
Yang Xu
Huan Hu
author_sort Lansheng Zhang
collection DOAJ
description We report a cost-effective and scalable methodology for producing a hierarchical micro-/nanostructured silicon surface solely by metal-assisted chemical etching. It involves two major processing steps of fabricating micropillars and nanowires separately. The process of producing micro-scale structures by masked metal-assisted chemical etching was optimized. Silicon nanowires were created on the micropillar’s surface via maskless metal-assisted chemical etching. The hierarchical micro-/nanostructured surface exhibits superhydrophobic properties with a high contact angle of ~156° and a low sliding angle of <2.5° for deionized water. Furthermore, due to the existence of microscale and nanoscale air trapped at the liquid/solid interface, it exhibits a long ice delay time of 2876 s at −5 °C, more than 5 times longer than that of smooth surfaces. Compared to conventional dry etching methods, the metal-assisted chemical etching approach excludes vacuum environments and high-temperature processes and can be applied for applications requiring hierarchical micro-/nanostructured surfaces or structures.
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spelling doaj.art-92ea181e734d4c32abb82807a5c13e592023-11-30T21:29:18ZengMDPI AGMicromachines2072-666X2022-07-01137107710.3390/mi13071077Bio-Inspired Hierarchical Micro-/Nanostructures for Anti-Icing Solely Fabricated by Metal-Assisted Chemical EtchingLansheng Zhang0Xiaoyang Chu1Feng Tian2Yang Xu3Huan Hu4ZJU-UIUC Institute, International Campus, Zhejiang University, Haining 314400, ChinaZJU-UIUC Institute, International Campus, Zhejiang University, Haining 314400, ChinaZJU-UIUC Institute, International Campus, Zhejiang University, Haining 314400, ChinaSchool of Micro-Nano Electronics, Zhejiang University, Hangzhou 310000, ChinaZJU-UIUC Institute, International Campus, Zhejiang University, Haining 314400, ChinaWe report a cost-effective and scalable methodology for producing a hierarchical micro-/nanostructured silicon surface solely by metal-assisted chemical etching. It involves two major processing steps of fabricating micropillars and nanowires separately. The process of producing micro-scale structures by masked metal-assisted chemical etching was optimized. Silicon nanowires were created on the micropillar’s surface via maskless metal-assisted chemical etching. The hierarchical micro-/nanostructured surface exhibits superhydrophobic properties with a high contact angle of ~156° and a low sliding angle of <2.5° for deionized water. Furthermore, due to the existence of microscale and nanoscale air trapped at the liquid/solid interface, it exhibits a long ice delay time of 2876 s at −5 °C, more than 5 times longer than that of smooth surfaces. Compared to conventional dry etching methods, the metal-assisted chemical etching approach excludes vacuum environments and high-temperature processes and can be applied for applications requiring hierarchical micro-/nanostructured surfaces or structures.https://www.mdpi.com/2072-666X/13/7/1077hierarchical micro-/nanostructuressuperhydrophobicanti-icingmetal-assisted chemical etching
spellingShingle Lansheng Zhang
Xiaoyang Chu
Feng Tian
Yang Xu
Huan Hu
Bio-Inspired Hierarchical Micro-/Nanostructures for Anti-Icing Solely Fabricated by Metal-Assisted Chemical Etching
Micromachines
hierarchical micro-/nanostructures
superhydrophobic
anti-icing
metal-assisted chemical etching
title Bio-Inspired Hierarchical Micro-/Nanostructures for Anti-Icing Solely Fabricated by Metal-Assisted Chemical Etching
title_full Bio-Inspired Hierarchical Micro-/Nanostructures for Anti-Icing Solely Fabricated by Metal-Assisted Chemical Etching
title_fullStr Bio-Inspired Hierarchical Micro-/Nanostructures for Anti-Icing Solely Fabricated by Metal-Assisted Chemical Etching
title_full_unstemmed Bio-Inspired Hierarchical Micro-/Nanostructures for Anti-Icing Solely Fabricated by Metal-Assisted Chemical Etching
title_short Bio-Inspired Hierarchical Micro-/Nanostructures for Anti-Icing Solely Fabricated by Metal-Assisted Chemical Etching
title_sort bio inspired hierarchical micro nanostructures for anti icing solely fabricated by metal assisted chemical etching
topic hierarchical micro-/nanostructures
superhydrophobic
anti-icing
metal-assisted chemical etching
url https://www.mdpi.com/2072-666X/13/7/1077
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AT xiaoyangchu bioinspiredhierarchicalmicronanostructuresforantiicingsolelyfabricatedbymetalassistedchemicaletching
AT fengtian bioinspiredhierarchicalmicronanostructuresforantiicingsolelyfabricatedbymetalassistedchemicaletching
AT yangxu bioinspiredhierarchicalmicronanostructuresforantiicingsolelyfabricatedbymetalassistedchemicaletching
AT huanhu bioinspiredhierarchicalmicronanostructuresforantiicingsolelyfabricatedbymetalassistedchemicaletching