AFM Characterization of Temperature Effect on the SU-8 Mechanical and Tribological Properties
This study presents the effect of temperature on the mechanical and tribological properties of SU-8 polymer. The temperature of investigated samples increasing during testing and the variation of mechanical and tribological properties were monitored. The samples for tests were SU-8 hard baked at dif...
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| Format: | Article |
| Language: | English |
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MDPI AG
2022-03-01
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| Series: | Polymers |
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| Online Access: | https://www.mdpi.com/2073-4360/14/5/1009 |
| _version_ | 1797474028150063104 |
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| author | Marius Pustan Corina Birleanu Rodica Voicu Raluca Muller |
| author_facet | Marius Pustan Corina Birleanu Rodica Voicu Raluca Muller |
| author_sort | Marius Pustan |
| collection | DOAJ |
| description | This study presents the effect of temperature on the mechanical and tribological properties of SU-8 polymer. The temperature of investigated samples increasing during testing and the variation of mechanical and tribological properties were monitored. The samples for tests were SU-8 hard baked at different temperatures. The hard bake temperature changes the mechanical and tribological properties of polymers. The aim of this research work is the reliability design improvement of SU-8 microstructures from electro-thermally actuated devices where a thermal gradient produces the softening and modification of SU-8 behavior. As a function of the hard baked temperature, different mechanical and tribological properties were experimentally determined using the atomic force microscopy (AFM) technique. The mechanical properties of interest are the modulus of elasticity and hardness. The investigated tribological properties involve the adhesion and friction forces. The modulus of elasticity and hardness decrease if the operating temperature increases based on the thermal relaxation of material and their viscoelastic behavior. The adhesion force between AFM tip and investigated samples increases if the operating temperature increases, respectively. The same evolution was experimentally observed in the case of friction force. Moreover, for the same testing temperature, the modulus of elasticity and hardness increase, and the adhesion and friction forces decrease if the SU-8 is hard baked at high temperature. |
| first_indexed | 2024-03-09T20:24:25Z |
| format | Article |
| id | doaj.art-9390ad945e084c79a5733be3fd4a08e2 |
| institution | Directory Open Access Journal |
| issn | 2073-4360 |
| language | English |
| last_indexed | 2024-03-09T20:24:25Z |
| publishDate | 2022-03-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Polymers |
| spelling | doaj.art-9390ad945e084c79a5733be3fd4a08e22023-11-23T23:39:47ZengMDPI AGPolymers2073-43602022-03-01145100910.3390/polym14051009AFM Characterization of Temperature Effect on the SU-8 Mechanical and Tribological PropertiesMarius Pustan0Corina Birleanu1Rodica Voicu2Raluca Muller3Micro & Nano Systems Laboratory, Department of Mechanical Systems Engineering, Technical University of Cluj-Napoca, 103-105 Muncii Street, 400641 Cluj-Napoca, RomaniaModeling, Simulation and CAD Laboratory, National Institute for Research and Development in Microtechnologies—IMT Bucharest, 126A Erou Iancu Nicolae Street, 077190 Bucharest, RomaniaModeling, Simulation and CAD Laboratory, National Institute for Research and Development in Microtechnologies—IMT Bucharest, 126A Erou Iancu Nicolae Street, 077190 Bucharest, RomaniaModeling, Simulation and CAD Laboratory, National Institute for Research and Development in Microtechnologies—IMT Bucharest, 126A Erou Iancu Nicolae Street, 077190 Bucharest, RomaniaThis study presents the effect of temperature on the mechanical and tribological properties of SU-8 polymer. The temperature of investigated samples increasing during testing and the variation of mechanical and tribological properties were monitored. The samples for tests were SU-8 hard baked at different temperatures. The hard bake temperature changes the mechanical and tribological properties of polymers. The aim of this research work is the reliability design improvement of SU-8 microstructures from electro-thermally actuated devices where a thermal gradient produces the softening and modification of SU-8 behavior. As a function of the hard baked temperature, different mechanical and tribological properties were experimentally determined using the atomic force microscopy (AFM) technique. The mechanical properties of interest are the modulus of elasticity and hardness. The investigated tribological properties involve the adhesion and friction forces. The modulus of elasticity and hardness decrease if the operating temperature increases based on the thermal relaxation of material and their viscoelastic behavior. The adhesion force between AFM tip and investigated samples increases if the operating temperature increases, respectively. The same evolution was experimentally observed in the case of friction force. Moreover, for the same testing temperature, the modulus of elasticity and hardness increase, and the adhesion and friction forces decrease if the SU-8 is hard baked at high temperature.https://www.mdpi.com/2073-4360/14/5/1009SU-8AFMmodulus of elasticityhardnessadhesionfriction |
| spellingShingle | Marius Pustan Corina Birleanu Rodica Voicu Raluca Muller AFM Characterization of Temperature Effect on the SU-8 Mechanical and Tribological Properties Polymers SU-8 AFM modulus of elasticity hardness adhesion friction |
| title | AFM Characterization of Temperature Effect on the SU-8 Mechanical and Tribological Properties |
| title_full | AFM Characterization of Temperature Effect on the SU-8 Mechanical and Tribological Properties |
| title_fullStr | AFM Characterization of Temperature Effect on the SU-8 Mechanical and Tribological Properties |
| title_full_unstemmed | AFM Characterization of Temperature Effect on the SU-8 Mechanical and Tribological Properties |
| title_short | AFM Characterization of Temperature Effect on the SU-8 Mechanical and Tribological Properties |
| title_sort | afm characterization of temperature effect on the su 8 mechanical and tribological properties |
| topic | SU-8 AFM modulus of elasticity hardness adhesion friction |
| url | https://www.mdpi.com/2073-4360/14/5/1009 |
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