Design and Parameter Identification for a Positioning Platform with a Large Stroke and High Precision for Segmented Mirrors
An active optical system with three segmented mirrors was proposed to verify the co-focus and co-phase progress. In this system, a kind of large-stroke and high-precision parallel positioning platform was specially developed to help support the mirrors and reduce the error between them, which can mo...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2023-03-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/14/4/713 |
| _version_ | 1797604322585870336 |
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| author | Zihao Yin Rongjie Qin Haoting Du Weiyinuo Zhou Jialin Sun Dexin Sun Yinnian Liu |
| author_facet | Zihao Yin Rongjie Qin Haoting Du Weiyinuo Zhou Jialin Sun Dexin Sun Yinnian Liu |
| author_sort | Zihao Yin |
| collection | DOAJ |
| description | An active optical system with three segmented mirrors was proposed to verify the co-focus and co-phase progress. In this system, a kind of large-stroke and high-precision parallel positioning platform was specially developed to help support the mirrors and reduce the error between them, which can move in three degrees of freedom out of plane. The positioning platform was composed of three flexible legs and three capacitive displacement sensors. For the flexible leg, a kind of forward-type amplification mechanism was specially designed to amplify the displacement of the piezoelectric actuator. The output stroke of the flexible leg was no less than 220 μm and the step resolution was up to 10 nm. Further, a linear model was established to identify the amplification ratio between the actuator and the flexible leg, which can increase the precision of the positioning platform. Moreover, three capacitive displacement sensors with a resolution of 2.5 nm were symmetrically installed in the platform to accurately measure the position and attitude of the platform. To improve the stability and precision of the platform, particle swarm optimization algorithm was applied to identify the control matrix, which can help the platform achieve ultra-high precision positioning. The results showed that the theoretical matrix parameters had a maximum deviation of 5.67% from the experimental ones. Finally, abundant experiments verified the excellent and stable performance of the platform. The results proved that while bearing the heavy mirror, which is no more than 5 kg, the platform can realize a 220 μm translation stroke and 2.0 mrad deflection stroke, with a high step resolution of 20 nm and 0.19 μrad. These indicators can perfectly cater to the requirements of the proposed segmented mirror system’s co-focus and co-phase adjustment progress. |
| first_indexed | 2024-03-11T04:44:49Z |
| format | Article |
| id | doaj.art-93b093a224f04394a8ca7dab39b91e46 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-11T04:44:49Z |
| publishDate | 2023-03-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-93b093a224f04394a8ca7dab39b91e462023-11-17T20:28:17ZengMDPI AGMicromachines2072-666X2023-03-0114471310.3390/mi14040713Design and Parameter Identification for a Positioning Platform with a Large Stroke and High Precision for Segmented MirrorsZihao Yin0Rongjie Qin1Haoting Du2Weiyinuo Zhou3Jialin Sun4Dexin Sun5Yinnian Liu6Key Laboratory of Infrared System Detection and Imaging Technologies, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, ChinaKey Laboratory of Infrared System Detection and Imaging Technologies, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, ChinaKey Laboratory of Infrared System Detection and Imaging Technologies, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, ChinaKey Laboratory of Infrared System Detection and Imaging Technologies, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, ChinaKey Laboratory of Infrared System Detection and Imaging Technologies, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, ChinaKey Laboratory of Infrared System Detection and Imaging Technologies, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, ChinaKey Laboratory of Infrared System Detection and Imaging Technologies, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, ChinaAn active optical system with three segmented mirrors was proposed to verify the co-focus and co-phase progress. In this system, a kind of large-stroke and high-precision parallel positioning platform was specially developed to help support the mirrors and reduce the error between them, which can move in three degrees of freedom out of plane. The positioning platform was composed of three flexible legs and three capacitive displacement sensors. For the flexible leg, a kind of forward-type amplification mechanism was specially designed to amplify the displacement of the piezoelectric actuator. The output stroke of the flexible leg was no less than 220 μm and the step resolution was up to 10 nm. Further, a linear model was established to identify the amplification ratio between the actuator and the flexible leg, which can increase the precision of the positioning platform. Moreover, three capacitive displacement sensors with a resolution of 2.5 nm were symmetrically installed in the platform to accurately measure the position and attitude of the platform. To improve the stability and precision of the platform, particle swarm optimization algorithm was applied to identify the control matrix, which can help the platform achieve ultra-high precision positioning. The results showed that the theoretical matrix parameters had a maximum deviation of 5.67% from the experimental ones. Finally, abundant experiments verified the excellent and stable performance of the platform. The results proved that while bearing the heavy mirror, which is no more than 5 kg, the platform can realize a 220 μm translation stroke and 2.0 mrad deflection stroke, with a high step resolution of 20 nm and 0.19 μrad. These indicators can perfectly cater to the requirements of the proposed segmented mirror system’s co-focus and co-phase adjustment progress.https://www.mdpi.com/2072-666X/14/4/713active optics3-DOF parallel positioning platformflexile amplification mechanismparticle swarm optimizationlarge stroke and high precision |
| spellingShingle | Zihao Yin Rongjie Qin Haoting Du Weiyinuo Zhou Jialin Sun Dexin Sun Yinnian Liu Design and Parameter Identification for a Positioning Platform with a Large Stroke and High Precision for Segmented Mirrors Micromachines active optics 3-DOF parallel positioning platform flexile amplification mechanism particle swarm optimization large stroke and high precision |
| title | Design and Parameter Identification for a Positioning Platform with a Large Stroke and High Precision for Segmented Mirrors |
| title_full | Design and Parameter Identification for a Positioning Platform with a Large Stroke and High Precision for Segmented Mirrors |
| title_fullStr | Design and Parameter Identification for a Positioning Platform with a Large Stroke and High Precision for Segmented Mirrors |
| title_full_unstemmed | Design and Parameter Identification for a Positioning Platform with a Large Stroke and High Precision for Segmented Mirrors |
| title_short | Design and Parameter Identification for a Positioning Platform with a Large Stroke and High Precision for Segmented Mirrors |
| title_sort | design and parameter identification for a positioning platform with a large stroke and high precision for segmented mirrors |
| topic | active optics 3-DOF parallel positioning platform flexile amplification mechanism particle swarm optimization large stroke and high precision |
| url | https://www.mdpi.com/2072-666X/14/4/713 |
| work_keys_str_mv | AT zihaoyin designandparameteridentificationforapositioningplatformwithalargestrokeandhighprecisionforsegmentedmirrors AT rongjieqin designandparameteridentificationforapositioningplatformwithalargestrokeandhighprecisionforsegmentedmirrors AT haotingdu designandparameteridentificationforapositioningplatformwithalargestrokeandhighprecisionforsegmentedmirrors AT weiyinuozhou designandparameteridentificationforapositioningplatformwithalargestrokeandhighprecisionforsegmentedmirrors AT jialinsun designandparameteridentificationforapositioningplatformwithalargestrokeandhighprecisionforsegmentedmirrors AT dexinsun designandparameteridentificationforapositioningplatformwithalargestrokeandhighprecisionforsegmentedmirrors AT yinnianliu designandparameteridentificationforapositioningplatformwithalargestrokeandhighprecisionforsegmentedmirrors |