Optical method for distance and displacement measurements of the probe-sample separation in a scanning near-field optical microscope

In this work, we present an alternative optical method to determine the probe-sample separation distance in a scanning near-field optical microscope. The experimental method is based in a Lloyd’s mirror interferometer and offers a measurement precision deviation of ∼100 nm using digital image proces...

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Main Authors: L. Santamaria, C. E. Garcia-Ortiz, H. R. Siller, R. Cortes, V. Coello
Format: Article
Language:English
Published: AIP Publishing LLC 2016-04-01
Series:AIP Advances
Online Access:http://dx.doi.org/10.1063/1.4947114
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author L. Santamaria
C. E. Garcia-Ortiz
H. R. Siller
R. Cortes
V. Coello
author_facet L. Santamaria
C. E. Garcia-Ortiz
H. R. Siller
R. Cortes
V. Coello
author_sort L. Santamaria
collection DOAJ
description In this work, we present an alternative optical method to determine the probe-sample separation distance in a scanning near-field optical microscope. The experimental method is based in a Lloyd’s mirror interferometer and offers a measurement precision deviation of ∼100 nm using digital image processing and numerical analysis. The technique can also be strategically combined with the characterization of piezoelectric actuators and stability evaluation of the optical system. It also opens the possibility for the development of an automatic approximation control system valid for probe-sample distances from 5 to 500 μm.
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spelling doaj.art-94109f43b95b4ad2b8a062c472ff5f6a2022-12-22T00:10:12ZengAIP Publishing LLCAIP Advances2158-32262016-04-0164045007045007-410.1063/1.4947114028604ADVOptical method for distance and displacement measurements of the probe-sample separation in a scanning near-field optical microscopeL. Santamaria0C. E. Garcia-Ortiz1H. R. Siller2R. Cortes3V. Coello4Tecnológico de Monterrey, Eugenio Garza Sada 2501 Sur, Monterrey, N.L., 64849, MexicoCONACYT Research Fellow – CICESE, Unidad Monterrey, Alianza Centro 504, Apodaca, NL, 66629, MexicoTecnológico de Monterrey, Eugenio Garza Sada 2501 Sur, Monterrey, N.L., 64849, MexicoCICESE, Unidad Monterrey, PIIT, Alianza Centro 504, Apodaca, NL, 66629, MexicoCICESE, Unidad Monterrey, PIIT, Alianza Centro 504, Apodaca, NL, 66629, MexicoIn this work, we present an alternative optical method to determine the probe-sample separation distance in a scanning near-field optical microscope. The experimental method is based in a Lloyd’s mirror interferometer and offers a measurement precision deviation of ∼100 nm using digital image processing and numerical analysis. The technique can also be strategically combined with the characterization of piezoelectric actuators and stability evaluation of the optical system. It also opens the possibility for the development of an automatic approximation control system valid for probe-sample distances from 5 to 500 μm.http://dx.doi.org/10.1063/1.4947114
spellingShingle L. Santamaria
C. E. Garcia-Ortiz
H. R. Siller
R. Cortes
V. Coello
Optical method for distance and displacement measurements of the probe-sample separation in a scanning near-field optical microscope
AIP Advances
title Optical method for distance and displacement measurements of the probe-sample separation in a scanning near-field optical microscope
title_full Optical method for distance and displacement measurements of the probe-sample separation in a scanning near-field optical microscope
title_fullStr Optical method for distance and displacement measurements of the probe-sample separation in a scanning near-field optical microscope
title_full_unstemmed Optical method for distance and displacement measurements of the probe-sample separation in a scanning near-field optical microscope
title_short Optical method for distance and displacement measurements of the probe-sample separation in a scanning near-field optical microscope
title_sort optical method for distance and displacement measurements of the probe sample separation in a scanning near field optical microscope
url http://dx.doi.org/10.1063/1.4947114
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