Optical method for distance and displacement measurements of the probe-sample separation in a scanning near-field optical microscope
In this work, we present an alternative optical method to determine the probe-sample separation distance in a scanning near-field optical microscope. The experimental method is based in a Lloyd’s mirror interferometer and offers a measurement precision deviation of ∼100 nm using digital image proces...
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2016-04-01
|
| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.4947114 |