Phase-Modulated Standing Wave Interferometer
The actual technical implementation of conventional interferometers is quite complex and requires manual manufacturing. In combination with the required construction space defined by the optical setup, their applications are limited to selected measuring tasks. In contrast, Standing Wave Interferome...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2021-03-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/12/4/357 |
| _version_ | 1797539969350238208 |
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| author | Ingo Ortlepp Eberhard Manske Jens-Peter Zöllner Ivo W. Rangelow |
| author_facet | Ingo Ortlepp Eberhard Manske Jens-Peter Zöllner Ivo W. Rangelow |
| author_sort | Ingo Ortlepp |
| collection | DOAJ |
| description | The actual technical implementation of conventional interferometers is quite complex and requires manual manufacturing. In combination with the required construction space defined by the optical setup, their applications are limited to selected measuring tasks. In contrast, Standing Wave Interferometers (<i>SWI</i>s) offer an enormous potential for miniaturisation because of their simple linear optical setup, consisting only of a laser source, a measuring mirror and two transparent standing wave sensors for obtaining quadrature signals. The two sensors are located inside the measuring beam and therefore directly influence the length measurement. To reduce optical influences on the standing wave and avoid the need for an exact and long-term stable sensor-to-sensor-distance, a single sensor configuration was developed. There, a phase modulation is superimposed to the sensor signal by a forced oscillation of the measuring mirror. When the correct modulation stroke is applied, the resulting harmonics in the sensor signal are 90° phase-shifted to each other and can hence be used for obtaining quadrature signals for phase demodulation and direction discrimination by an arctan-algorithm. |
| first_indexed | 2024-03-10T12:54:22Z |
| format | Article |
| id | doaj.art-941dcb8a406b4726b4304074fa8b73f1 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-10T12:54:22Z |
| publishDate | 2021-03-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-941dcb8a406b4726b4304074fa8b73f12023-11-21T12:04:52ZengMDPI AGMicromachines2072-666X2021-03-0112435710.3390/mi12040357Phase-Modulated Standing Wave InterferometerIngo Ortlepp0Eberhard Manske1Jens-Peter Zöllner2Ivo W. Rangelow3Institute of Process Measurement and Sensor Technology, Technische Universität Ilmenau, 98693 Ilmenau, GermanyInstitute of Process Measurement and Sensor Technology, Technische Universität Ilmenau, 98693 Ilmenau, GermanyGroup: Microelectronic and Nanoelectronic Systems, Technische Universität Ilmenau, 98693 Ilmenau, GermanyNanoscale Systems Group, Technische Universität Ilmenau, 98693 Ilmenau, GermanyThe actual technical implementation of conventional interferometers is quite complex and requires manual manufacturing. In combination with the required construction space defined by the optical setup, their applications are limited to selected measuring tasks. In contrast, Standing Wave Interferometers (<i>SWI</i>s) offer an enormous potential for miniaturisation because of their simple linear optical setup, consisting only of a laser source, a measuring mirror and two transparent standing wave sensors for obtaining quadrature signals. The two sensors are located inside the measuring beam and therefore directly influence the length measurement. To reduce optical influences on the standing wave and avoid the need for an exact and long-term stable sensor-to-sensor-distance, a single sensor configuration was developed. There, a phase modulation is superimposed to the sensor signal by a forced oscillation of the measuring mirror. When the correct modulation stroke is applied, the resulting harmonics in the sensor signal are 90° phase-shifted to each other and can hence be used for obtaining quadrature signals for phase demodulation and direction discrimination by an arctan-algorithm.https://www.mdpi.com/2072-666X/12/4/357standing waveinterferometerphoto sensorphase modulation |
| spellingShingle | Ingo Ortlepp Eberhard Manske Jens-Peter Zöllner Ivo W. Rangelow Phase-Modulated Standing Wave Interferometer Micromachines standing wave interferometer photo sensor phase modulation |
| title | Phase-Modulated Standing Wave Interferometer |
| title_full | Phase-Modulated Standing Wave Interferometer |
| title_fullStr | Phase-Modulated Standing Wave Interferometer |
| title_full_unstemmed | Phase-Modulated Standing Wave Interferometer |
| title_short | Phase-Modulated Standing Wave Interferometer |
| title_sort | phase modulated standing wave interferometer |
| topic | standing wave interferometer photo sensor phase modulation |
| url | https://www.mdpi.com/2072-666X/12/4/357 |
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