A Dual-Chamber Serial–Parallel Piezoelectric Pump with an Integrated Sensor for Flow Rate Measurement
A new concept of a dual-chamber serial-parallel piezoelectric pump with an integrated sensor (DSPPIS) is presented in this paper. By means of dividing a piezoelectric bimorph into an actuator and a sensor, sensing function is integrated onto the DSPPIS for flow rate measurement. A prototype of the D...
Main Authors: | Song Chen, Mai Yu, Junwu Kan, Jianping Li, Zhonghua Zhang, Xinyi Xie, Xiaomin Wang |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2019-03-01
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Series: | Sensors |
Subjects: | |
Online Access: | https://www.mdpi.com/1424-8220/19/6/1447 |
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