Large-scale and high-quality III-nitride membranes through microcavity-assisted crack propagation by engineering tensile-stressed Ni layers
Epitaxially grown III-nitride alloys are tightly bonded materials with mixed covalent-ionic bonds. This tight bonding presents tremendous challenges in developing III-nitride membranes, even though semiconductor membranes can provide numerous advantages by removing thick, inflexible, and costly subs...
| Автори: | , , , , , , , , , , , , |
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| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
Editorial Office of Opto-Electronic Journals, Institute of Optics and Electronics, CAS, China
2022-10-01
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| Серія: | Opto-Electronic Science |
| Предмети: | |
| Онлайн доступ: | https://www.oejournal.org/article/doi/10.29026/oes.2022.220016 |