Large-scale and high-quality III-nitride membranes through microcavity-assisted crack propagation by engineering tensile-stressed Ni layers
Epitaxially grown III-nitride alloys are tightly bonded materials with mixed covalent-ionic bonds. This tight bonding presents tremendous challenges in developing III-nitride membranes, even though semiconductor membranes can provide numerous advantages by removing thick, inflexible, and costly subs...
Main Authors: | , , , , , , , , , , , , |
---|---|
格式: | Article |
語言: | English |
出版: |
Editorial Office of Opto-Electronic Journals, Institute of Optics and Electronics, CAS, China
2022-10-01
|
叢編: | Opto-Electronic Science |
主題: | |
在線閱讀: | https://www.oejournal.org/article/doi/10.29026/oes.2022.220016 |