Optical characterization of deuterated silicon-rich nitride waveguides

Optical characterization of deuterated silicon-rich nitride waveguides

Abstract Chemical vapor deposition-based growth techniques allow flexible design of complementary metal-oxide semiconductor (CMOS) compatible materials. Here, we report the deuterated silicon-rich nitride films grown using plasma-enhanced chemical vapor deposition. The linear and nonlinear propertie...

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Bibliographic Details
Main Authors: Xavier X. Chia, George F. R. Chen, Yanmei Cao, Peng Xing, Hongwei Gao, Doris K. T. Ng, Dawn T. H. Tan
Format: Article
Language:English
Published: Nature Portfolio 2022-07-01
Series:Scientific Reports
Online Access:https://doi.org/10.1038/s41598-022-16889-7

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