Study for Laser Controlled Fabrication of Micro/Nano-Structures of Silicon Based on Multi-Physics Model
This work proposes a detailed process of micro/nano-structure surface modification in relation to temperature field. In this paper, a femtosecond laser is used to induce the surface morphology of a silicon substrate. We provide a new method for the fabrication of a micro/nano-cantilever probe by con...
Main Authors: | Liqun Wu, Jianlong Chen, Linan Zhang, Hongcheng Wang, Chao Chen |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2021-05-01
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Series: | Micromachines |
Subjects: | |
Online Access: | https://www.mdpi.com/2072-666X/12/5/528 |
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