A Monolithic Gimbal Micro-Mirror Fabricated and Remotely Tuned with a Femtosecond Laser
With the advent of ultrafast lasers, new manufacturing techniques have come into existence. In micromachining, the use of femtosecond lasers not only offers the possibility for three-dimensional monolithic fabrication inside a single optically transparent material, but also a means for remotely, and...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2019-09-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/10/9/611 |
| _version_ | 1819265396922908672 |
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| author | Saood Ibni Nazir Yves Bellouard |
| author_facet | Saood Ibni Nazir Yves Bellouard |
| author_sort | Saood Ibni Nazir |
| collection | DOAJ |
| description | With the advent of ultrafast lasers, new manufacturing techniques have come into existence. In micromachining, the use of femtosecond lasers not only offers the possibility for three-dimensional monolithic fabrication inside a single optically transparent material, but also a means for remotely, and arbitrarily, deforming substrates with nanometer resolution. Exploiting this principle and combining it with flexure design, we demonstrate a monolithic micro-mirror entirely made with a femtosecond laser and whose orientation is tuned in a non-contact manner by exposing some part of the device to low energy femtosecond pulses. Given the non-contact nature of the process, the alignment can be very precisely controlled with a resolution that is many orders of magnitude better than conventional techniques based on mechanical positioners. |
| first_indexed | 2024-12-23T20:44:43Z |
| format | Article |
| id | doaj.art-95a6afa153ab423bb352a99b058d281c |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-12-23T20:44:43Z |
| publishDate | 2019-09-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-95a6afa153ab423bb352a99b058d281c2022-12-21T17:31:49ZengMDPI AGMicromachines2072-666X2019-09-0110961110.3390/mi10090611mi10090611A Monolithic Gimbal Micro-Mirror Fabricated and Remotely Tuned with a Femtosecond LaserSaood Ibni Nazir0Yves Bellouard1Galatea Lab, STI/IMT, Ecole polytechnique fédérale de Lausanne (EPFL), Rue de la Maladière, 71b, Neuchâtel CH-2002, SwitzerlandGalatea Lab, STI/IMT, Ecole polytechnique fédérale de Lausanne (EPFL), Rue de la Maladière, 71b, Neuchâtel CH-2002, SwitzerlandWith the advent of ultrafast lasers, new manufacturing techniques have come into existence. In micromachining, the use of femtosecond lasers not only offers the possibility for three-dimensional monolithic fabrication inside a single optically transparent material, but also a means for remotely, and arbitrarily, deforming substrates with nanometer resolution. Exploiting this principle and combining it with flexure design, we demonstrate a monolithic micro-mirror entirely made with a femtosecond laser and whose orientation is tuned in a non-contact manner by exposing some part of the device to low energy femtosecond pulses. Given the non-contact nature of the process, the alignment can be very precisely controlled with a resolution that is many orders of magnitude better than conventional techniques based on mechanical positioners.https://www.mdpi.com/2072-666X/10/9/611femtosecond laser machiningnon-contacttunable opticsmicro-opticsflexuresrepositioningmonolithicfused silicaintegrated optics |
| spellingShingle | Saood Ibni Nazir Yves Bellouard A Monolithic Gimbal Micro-Mirror Fabricated and Remotely Tuned with a Femtosecond Laser Micromachines femtosecond laser machining non-contact tunable optics micro-optics flexures repositioning monolithic fused silica integrated optics |
| title | A Monolithic Gimbal Micro-Mirror Fabricated and Remotely Tuned with a Femtosecond Laser |
| title_full | A Monolithic Gimbal Micro-Mirror Fabricated and Remotely Tuned with a Femtosecond Laser |
| title_fullStr | A Monolithic Gimbal Micro-Mirror Fabricated and Remotely Tuned with a Femtosecond Laser |
| title_full_unstemmed | A Monolithic Gimbal Micro-Mirror Fabricated and Remotely Tuned with a Femtosecond Laser |
| title_short | A Monolithic Gimbal Micro-Mirror Fabricated and Remotely Tuned with a Femtosecond Laser |
| title_sort | monolithic gimbal micro mirror fabricated and remotely tuned with a femtosecond laser |
| topic | femtosecond laser machining non-contact tunable optics micro-optics flexures repositioning monolithic fused silica integrated optics |
| url | https://www.mdpi.com/2072-666X/10/9/611 |
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