Library of single-etch silicon nitride grating couplers for low-loss and fabrication-robust fiber-chip interconnection

Abstract Silicon nitride (Si3N4) waveguides become an appealing choice to realize complex photonic integrated circuits for applications in telecom/datacom transceivers, sensing, and quantum information sciences. However, compared to high-index-contrast silicon-on-insulator platform, the index differ...

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Váldodahkkit: Radovan Korček, David Medina Quiroz, Quentin Wilmart, Samson Edmond, Pavel Cheben, Laurent Vivien, Carlos Alonso-Ramos, Daniel Benedikovič
Materiálatiipa: Artihkal
Giella:English
Almmustuhtton: Nature Portfolio 2023-10-01
Ráidu:Scientific Reports
Liŋkkat:https://doi.org/10.1038/s41598-023-44824-x