| Summary: | In this paper, the dynamics of a micro-nano particle on the micro-thin plate driven by an acoustic signal was investigated, including the particle kinematics mode, kinematics equation, and trajectory control. According to Newton’s kinematic theorem, analyzing the forces acting on the particle, the kinematic modes of the driven particle are distinguished with specific mathematical conditions, which are classified as slide, bounce, and stable modes strictly planned on a thin plate area. Based on the theory of kinematic modal analysis, the simulation results reveal the distribution rules of particle motion modes against the driving signal or plate geometry. The particle kinematics equation governing the sliding movement on the thin plate was then derived in light of the interaction between the particle and driving signal, based on which, the particle trajectory was drawn and analyzed in detail. For the purpose of controlling the particle trajectory, the control problem was designed in accordance with a linear active disturbance rejection controller (LADRC). Further, a guidance law was proposed, and the corresponding controller was designed to realize the linear trajectory following.
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