Modeling, Simulation Methods and Characterization of Photon Detection Probability in CMOS-SPAD
Single-Photon Avalanche Diodes (SPAD) in Complementary Metal-Oxide Semiconductor (CMOS) technology are potential candidates for future “Light Detection and Ranging” (Lidar) space systems. Among the SPAD performance parameters, the Photon Detection Probability (PDP) is one of the principal parameters...
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MDPI AG
2021-08-01
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| Series: | Sensors |
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| Online Access: | https://www.mdpi.com/1424-8220/21/17/5860 |
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| author | Aymeric Panglosse Philippe Martin-Gonthier Olivier Marcelot Cédric Virmontois Olivier Saint-Pé Pierre Magnan |
| author_facet | Aymeric Panglosse Philippe Martin-Gonthier Olivier Marcelot Cédric Virmontois Olivier Saint-Pé Pierre Magnan |
| author_sort | Aymeric Panglosse |
| collection | DOAJ |
| description | Single-Photon Avalanche Diodes (SPAD) in Complementary Metal-Oxide Semiconductor (CMOS) technology are potential candidates for future “Light Detection and Ranging” (Lidar) space systems. Among the SPAD performance parameters, the Photon Detection Probability (PDP) is one of the principal parameters. Indeed, this parameter is used to evaluate the SPAD sensitivity, which directly affects the laser power or the telescope diameter of space-borne Lidars. In this work, we developed a model and a simulation method to predict accurately the PDP of CMOS SPAD, based on a combination of measurements to acquire the CMOS process doping profile, Technology Computer-Aided Design (TCAD) simulations, and a Matlab routine. We compare our simulation results with a SPAD designed and processed in CMOS 180 nm technology. Our results show good agreement between PDP predictions and measurements, with a mean error around 18.5%, for wavelength between 450 and 950 nm and for a typical range of excess voltages between 15 and 30% of the breakdown voltage. Due to our SPAD architecture, the high field region is not entirely insulated from the substrate, a comparison between simulations performed with and without the substrate contribution indicates that PDP can be simulated without this latter with a moderate loss of precision, around 4.5 percentage points. |
| first_indexed | 2024-03-10T08:04:07Z |
| format | Article |
| id | doaj.art-9648b36e4f0843a7bc6af5aa52ab49ed |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-03-10T08:04:07Z |
| publishDate | 2021-08-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-9648b36e4f0843a7bc6af5aa52ab49ed2023-11-22T11:13:33ZengMDPI AGSensors1424-82202021-08-012117586010.3390/s21175860Modeling, Simulation Methods and Characterization of Photon Detection Probability in CMOS-SPADAymeric Panglosse0Philippe Martin-Gonthier1Olivier Marcelot2Cédric Virmontois3Olivier Saint-Pé4Pierre Magnan5Department of Electronic Optic and Signal, ISAE-SUPAERO, University of Toulouse, 31055 Toulouse, FranceDepartment of Electronic Optic and Signal, ISAE-SUPAERO, University of Toulouse, 31055 Toulouse, FranceDepartment of Electronic Optic and Signal, ISAE-SUPAERO, University of Toulouse, 31055 Toulouse, FranceCNES, The French National Space Agency, 31400 Toulouse, FranceAirbus Defence and Space, 31400 Toulouse, FranceDepartment of Electronic Optic and Signal, ISAE-SUPAERO, University of Toulouse, 31055 Toulouse, FranceSingle-Photon Avalanche Diodes (SPAD) in Complementary Metal-Oxide Semiconductor (CMOS) technology are potential candidates for future “Light Detection and Ranging” (Lidar) space systems. Among the SPAD performance parameters, the Photon Detection Probability (PDP) is one of the principal parameters. Indeed, this parameter is used to evaluate the SPAD sensitivity, which directly affects the laser power or the telescope diameter of space-borne Lidars. In this work, we developed a model and a simulation method to predict accurately the PDP of CMOS SPAD, based on a combination of measurements to acquire the CMOS process doping profile, Technology Computer-Aided Design (TCAD) simulations, and a Matlab routine. We compare our simulation results with a SPAD designed and processed in CMOS 180 nm technology. Our results show good agreement between PDP predictions and measurements, with a mean error around 18.5%, for wavelength between 450 and 950 nm and for a typical range of excess voltages between 15 and 30% of the breakdown voltage. Due to our SPAD architecture, the high field region is not entirely insulated from the substrate, a comparison between simulations performed with and without the substrate contribution indicates that PDP can be simulated without this latter with a moderate loss of precision, around 4.5 percentage points.https://www.mdpi.com/1424-8220/21/17/5860single photon avalanche diode (SPAD)complementary metal-oxide semiconductor (CMOS)modeling and simulationsphoton detection probability (PDP)quantum efficiency (QE)technology computer-aided design (TCAD) |
| spellingShingle | Aymeric Panglosse Philippe Martin-Gonthier Olivier Marcelot Cédric Virmontois Olivier Saint-Pé Pierre Magnan Modeling, Simulation Methods and Characterization of Photon Detection Probability in CMOS-SPAD Sensors single photon avalanche diode (SPAD) complementary metal-oxide semiconductor (CMOS) modeling and simulations photon detection probability (PDP) quantum efficiency (QE) technology computer-aided design (TCAD) |
| title | Modeling, Simulation Methods and Characterization of Photon Detection Probability in CMOS-SPAD |
| title_full | Modeling, Simulation Methods and Characterization of Photon Detection Probability in CMOS-SPAD |
| title_fullStr | Modeling, Simulation Methods and Characterization of Photon Detection Probability in CMOS-SPAD |
| title_full_unstemmed | Modeling, Simulation Methods and Characterization of Photon Detection Probability in CMOS-SPAD |
| title_short | Modeling, Simulation Methods and Characterization of Photon Detection Probability in CMOS-SPAD |
| title_sort | modeling simulation methods and characterization of photon detection probability in cmos spad |
| topic | single photon avalanche diode (SPAD) complementary metal-oxide semiconductor (CMOS) modeling and simulations photon detection probability (PDP) quantum efficiency (QE) technology computer-aided design (TCAD) |
| url | https://www.mdpi.com/1424-8220/21/17/5860 |
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