ALD Deposited ZnO:Al Films on Mica for Flexible PDLC Devices
In this work, highly conductive Al-doped ZnO (AZO) films are deposited on transparent and flexible muscovite mica substrates by using the atomic layer deposition (ALD) technique. AZO-mica structures possess high optical transmittance at visible and near-infrared spectral range and retain low electri...
| Main Authors: | , , , , , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-04-01
|
| Series: | Nanomaterials |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2079-4991/11/4/1011 |
| _version_ | 1797537598798823424 |
|---|---|
| author | Dimitre Z. Dimitrov Zih Fan Chen Vera Marinova Dimitrina Petrova Chih Yao Ho Blagovest Napoleonov Blagoy Blagoev Velichka Strijkova Ken Yuh Hsu Shiuan Huei Lin Jenh-Yih Juang |
| author_facet | Dimitre Z. Dimitrov Zih Fan Chen Vera Marinova Dimitrina Petrova Chih Yao Ho Blagovest Napoleonov Blagoy Blagoev Velichka Strijkova Ken Yuh Hsu Shiuan Huei Lin Jenh-Yih Juang |
| author_sort | Dimitre Z. Dimitrov |
| collection | DOAJ |
| description | In this work, highly conductive Al-doped ZnO (AZO) films are deposited on transparent and flexible muscovite mica substrates by using the atomic layer deposition (ALD) technique. AZO-mica structures possess high optical transmittance at visible and near-infrared spectral range and retain low electric resistivity, even after continuous bending of up to 800 cycles. Structure performances after bending tests have been supported by atomic force microscopy (AFM) analysis. Based on performed optical and electrical characterizations AZO films on mica are implemented as transparent conductive electrodes in flexible polymer dispersed liquid crystal (PDLC) devices. The measured electro-optical characteristics and response time of the proposed devices reveal the higher potential of AZO-mica for future ITO-free flexible optoelectronic applications. |
| first_indexed | 2024-03-10T12:18:31Z |
| format | Article |
| id | doaj.art-967dc57ad74b4ee7a62879e009487f07 |
| institution | Directory Open Access Journal |
| issn | 2079-4991 |
| language | English |
| last_indexed | 2024-03-10T12:18:31Z |
| publishDate | 2021-04-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Nanomaterials |
| spelling | doaj.art-967dc57ad74b4ee7a62879e009487f072023-11-21T15:41:23ZengMDPI AGNanomaterials2079-49912021-04-01114101110.3390/nano11041011ALD Deposited ZnO:Al Films on Mica for Flexible PDLC DevicesDimitre Z. Dimitrov0Zih Fan Chen1Vera Marinova2Dimitrina Petrova3Chih Yao Ho4Blagovest Napoleonov5Blagoy Blagoev6Velichka Strijkova7Ken Yuh Hsu8Shiuan Huei Lin9Jenh-Yih Juang10Institute of Solid State Physics, Bulgarian Academy of Sciences, 1784 Sofia, BulgariaDepartment of Electrophysics, National Yang Ming Chiao Tung University, Hsinchu 30010, TaiwanInstitute of Optical Materials and Technologies, Bulgarian Academy of Sciences, 1113 Sofia, BulgariaInstitute of Optical Materials and Technologies, Bulgarian Academy of Sciences, 1113 Sofia, BulgariaDepartment of Electrophysics, National Yang Ming Chiao Tung University, Hsinchu 30010, TaiwanInstitute of Optical Materials and Technologies, Bulgarian Academy of Sciences, 1113 Sofia, BulgariaInstitute of Solid State Physics, Bulgarian Academy of Sciences, 1784 Sofia, BulgariaInstitute of Optical Materials and Technologies, Bulgarian Academy of Sciences, 1113 Sofia, BulgariaPhotonics Department, National Yang Ming Chiao Tung University, Hsinchu 30010, TaiwanDepartment of Electrophysics, National Yang Ming Chiao Tung University, Hsinchu 30010, TaiwanDepartment of Electrophysics, National Yang Ming Chiao Tung University, Hsinchu 30010, TaiwanIn this work, highly conductive Al-doped ZnO (AZO) films are deposited on transparent and flexible muscovite mica substrates by using the atomic layer deposition (ALD) technique. AZO-mica structures possess high optical transmittance at visible and near-infrared spectral range and retain low electric resistivity, even after continuous bending of up to 800 cycles. Structure performances after bending tests have been supported by atomic force microscopy (AFM) analysis. Based on performed optical and electrical characterizations AZO films on mica are implemented as transparent conductive electrodes in flexible polymer dispersed liquid crystal (PDLC) devices. The measured electro-optical characteristics and response time of the proposed devices reveal the higher potential of AZO-mica for future ITO-free flexible optoelectronic applications.https://www.mdpi.com/2079-4991/11/4/1011Al-doped ZnOALD techniquetransparent conductive layersPDLC structuresflexible devices |
| spellingShingle | Dimitre Z. Dimitrov Zih Fan Chen Vera Marinova Dimitrina Petrova Chih Yao Ho Blagovest Napoleonov Blagoy Blagoev Velichka Strijkova Ken Yuh Hsu Shiuan Huei Lin Jenh-Yih Juang ALD Deposited ZnO:Al Films on Mica for Flexible PDLC Devices Nanomaterials Al-doped ZnO ALD technique transparent conductive layers PDLC structures flexible devices |
| title | ALD Deposited ZnO:Al Films on Mica for Flexible PDLC Devices |
| title_full | ALD Deposited ZnO:Al Films on Mica for Flexible PDLC Devices |
| title_fullStr | ALD Deposited ZnO:Al Films on Mica for Flexible PDLC Devices |
| title_full_unstemmed | ALD Deposited ZnO:Al Films on Mica for Flexible PDLC Devices |
| title_short | ALD Deposited ZnO:Al Films on Mica for Flexible PDLC Devices |
| title_sort | ald deposited zno al films on mica for flexible pdlc devices |
| topic | Al-doped ZnO ALD technique transparent conductive layers PDLC structures flexible devices |
| url | https://www.mdpi.com/2079-4991/11/4/1011 |
| work_keys_str_mv | AT dimitrezdimitrov alddepositedznoalfilmsonmicaforflexiblepdlcdevices AT zihfanchen alddepositedznoalfilmsonmicaforflexiblepdlcdevices AT veramarinova alddepositedznoalfilmsonmicaforflexiblepdlcdevices AT dimitrinapetrova alddepositedznoalfilmsonmicaforflexiblepdlcdevices AT chihyaoho alddepositedznoalfilmsonmicaforflexiblepdlcdevices AT blagovestnapoleonov alddepositedznoalfilmsonmicaforflexiblepdlcdevices AT blagoyblagoev alddepositedznoalfilmsonmicaforflexiblepdlcdevices AT velichkastrijkova alddepositedznoalfilmsonmicaforflexiblepdlcdevices AT kenyuhhsu alddepositedznoalfilmsonmicaforflexiblepdlcdevices AT shiuanhueilin alddepositedznoalfilmsonmicaforflexiblepdlcdevices AT jenhyihjuang alddepositedznoalfilmsonmicaforflexiblepdlcdevices |