ALD Deposited ZnO:Al Films on Mica for Flexible PDLC Devices

ALD Deposited ZnO:Al Films on Mica for Flexible PDLC Devices

In this work, highly conductive Al-doped ZnO (AZO) films are deposited on transparent and flexible muscovite mica substrates by using the atomic layer deposition (ALD) technique. AZO-mica structures possess high optical transmittance at visible and near-infrared spectral range and retain low electri...

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Bibliographic Details
Main Authors: Dimitre Z. Dimitrov, Zih Fan Chen, Vera Marinova, Dimitrina Petrova, Chih Yao Ho, Blagovest Napoleonov, Blagoy Blagoev, Velichka Strijkova, Ken Yuh Hsu, Shiuan Huei Lin, Jenh-Yih Juang
Format: Article
Language:English
Published: MDPI AG 2021-04-01
Series:Nanomaterials
Subjects:
Al-doped ZnO
ALD technique
transparent conductive layers
PDLC structures
flexible devices
Online Access:https://www.mdpi.com/2079-4991/11/4/1011

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