A Customizable and Low-Cost Ultraviolet Exposure System for Photolithography

A Customizable and Low-Cost Ultraviolet Exposure System for Photolithography

For microfluidic device fabrication in the research, industry, and commercial areas, the curing and transfer of patterns on photoresist relies on ultraviolet (UV) light. Often, this step is performed by commercial mask aligner or UV lamp exposure systems; however, these machines are often expensive,...

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Bibliographic Details
Main Authors: David Eun Reynolds, Olivia Lewallen, George Galanis, Jina Ko
Format: Article
Language:English
Published: MDPI AG 2022-12-01
Series:Micromachines
Subjects:
UV exposure system
photolithography
droplet microfluidics
low-cost
portable
Online Access:https://www.mdpi.com/2072-666X/13/12/2129

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