Anti-Reflective Coatings Produced via Atomic Layer Deposition for Hybrid Polymer 3D Micro-Optics
The increasing demand for optics quality requires the lowest optical power loss, which can occur from unwanted reflections. Laser direct writing (LDW) allows for the fabrication of complex structures, which is particularly advantageous in micro-optic applications. This research demonstrates the poss...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2023-08-01
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| Series: | Nanomaterials |
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| Online Access: | https://www.mdpi.com/2079-4991/13/16/2281 |
| _version_ | 1827728996821893120 |
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| author | Darija Astrauskytė Karolis Galvanauskas Darius Gailevičius Mantas Drazdys Mangirdas Malinauskas Lina Grineviciute |
| author_facet | Darija Astrauskytė Karolis Galvanauskas Darius Gailevičius Mantas Drazdys Mangirdas Malinauskas Lina Grineviciute |
| author_sort | Darija Astrauskytė |
| collection | DOAJ |
| description | The increasing demand for optics quality requires the lowest optical power loss, which can occur from unwanted reflections. Laser direct writing (LDW) allows for the fabrication of complex structures, which is particularly advantageous in micro-optic applications. This research demonstrates the possibility of forming an anti-reflective coating on hybrid polymer micro-lenses fabricated by employing LDW without changing their geometry. Such coating deposited via atomic layer deposition (ALD) decreased the reflection from 3.3% to 0.1% at a wavelength of 633 nm for one surface of hybrid organic–inorganic SZ2080™ material. This research validates the compatibility of ALD with LDW 3D multiphoton lithography synergistically, expanding its applications on optical grade sub-100 μm scale micro-optics. |
| first_indexed | 2024-03-10T23:41:38Z |
| format | Article |
| id | doaj.art-977875cbd3064abba8ee498fe2119844 |
| institution | Directory Open Access Journal |
| issn | 2079-4991 |
| language | English |
| last_indexed | 2024-03-10T23:41:38Z |
| publishDate | 2023-08-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Nanomaterials |
| spelling | doaj.art-977875cbd3064abba8ee498fe21198442023-11-19T02:26:40ZengMDPI AGNanomaterials2079-49912023-08-011316228110.3390/nano13162281Anti-Reflective Coatings Produced via Atomic Layer Deposition for Hybrid Polymer 3D Micro-OpticsDarija Astrauskytė0Karolis Galvanauskas1Darius Gailevičius2Mantas Drazdys3Mangirdas Malinauskas4Lina Grineviciute5Center for Physical Sciences and Technology, Savanorių av. 231, LT-02300 Vilnius, LithuaniaLaser Research Center, Physics Faculty, Vilnius University, Saulėtekio av. 10, LT-10223 Vilnius, LithuaniaLaser Research Center, Physics Faculty, Vilnius University, Saulėtekio av. 10, LT-10223 Vilnius, LithuaniaCenter for Physical Sciences and Technology, Savanorių av. 231, LT-02300 Vilnius, LithuaniaLaser Research Center, Physics Faculty, Vilnius University, Saulėtekio av. 10, LT-10223 Vilnius, LithuaniaCenter for Physical Sciences and Technology, Savanorių av. 231, LT-02300 Vilnius, LithuaniaThe increasing demand for optics quality requires the lowest optical power loss, which can occur from unwanted reflections. Laser direct writing (LDW) allows for the fabrication of complex structures, which is particularly advantageous in micro-optic applications. This research demonstrates the possibility of forming an anti-reflective coating on hybrid polymer micro-lenses fabricated by employing LDW without changing their geometry. Such coating deposited via atomic layer deposition (ALD) decreased the reflection from 3.3% to 0.1% at a wavelength of 633 nm for one surface of hybrid organic–inorganic SZ2080™ material. This research validates the compatibility of ALD with LDW 3D multiphoton lithography synergistically, expanding its applications on optical grade sub-100 μm scale micro-optics.https://www.mdpi.com/2079-4991/13/16/2281atomic layer depositionanti-reflective coatingmicro-opticsSZ2080™multi-photon lithographydirect laser writing |
| spellingShingle | Darija Astrauskytė Karolis Galvanauskas Darius Gailevičius Mantas Drazdys Mangirdas Malinauskas Lina Grineviciute Anti-Reflective Coatings Produced via Atomic Layer Deposition for Hybrid Polymer 3D Micro-Optics Nanomaterials atomic layer deposition anti-reflective coating micro-optics SZ2080™ multi-photon lithography direct laser writing |
| title | Anti-Reflective Coatings Produced via Atomic Layer Deposition for Hybrid Polymer 3D Micro-Optics |
| title_full | Anti-Reflective Coatings Produced via Atomic Layer Deposition for Hybrid Polymer 3D Micro-Optics |
| title_fullStr | Anti-Reflective Coatings Produced via Atomic Layer Deposition for Hybrid Polymer 3D Micro-Optics |
| title_full_unstemmed | Anti-Reflective Coatings Produced via Atomic Layer Deposition for Hybrid Polymer 3D Micro-Optics |
| title_short | Anti-Reflective Coatings Produced via Atomic Layer Deposition for Hybrid Polymer 3D Micro-Optics |
| title_sort | anti reflective coatings produced via atomic layer deposition for hybrid polymer 3d micro optics |
| topic | atomic layer deposition anti-reflective coating micro-optics SZ2080™ multi-photon lithography direct laser writing |
| url | https://www.mdpi.com/2079-4991/13/16/2281 |
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