Interaction between electric field and plasma in inductively coupled discharges
In regard to collisionless heating in inductively coupled discharges, two approaches have been widely adopted to describe the energy transfer between electrons and the radio frequency field. One approach is based on consistent kinetic theory, by which the resulting field can be expressed as the supe...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2022-11-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/5.0108859 |