Preliminary Study on Automatic Detection of Hard Defects in Integrated Circuits Based on Thermal Laser Stimulation

Preliminary Study on Automatic Detection of Hard Defects in Integrated Circuits Based on Thermal Laser Stimulation

Locating the fault position is a crucial part of the failure mechanism analysis of integrated circuits. This paper proposes a hard defect locating system based on Thermal Laser Stimulation (TLS) technology. The equation for laser-induced changes in the electrical parameters of semiconductor devices...

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Bibliographic Details
Main Authors: Wenjian Wu, Yingqi Ma, Minghui Cai, Jianwei Han
Format: Article
Language:English
Published: MDPI AG 2023-05-01
Series:Photonics
Subjects:
hard defect
thermal laser stimulation
scanning mode
abnormal signal extract
EMMI
Online Access:https://www.mdpi.com/2304-6732/10/5/540

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