Precise Blaze Angle Adjustment of Echelle Grating by Self-Shadowing Rotating Mask

Precise Blaze Angle Adjustment of Echelle Grating by Self-Shadowing Rotating Mask

Angular precision of 0.1° for the blaze angle of echelle gratings is an important technical requirement for spectral instruments with echelle gratings. This paper proposes a precise adjustment method for the blaze angle of echelle gratings that are etched or deposited by self-shadowing ro...

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Bibliographic Details
Main Authors: Bin Sheng, Jiaojiao Fan, Yuanshen Huang, Junjun Guo, Haoyu Lyu, Dawei Zhang, Songlin Zhuang
Format: Article
Language:English
Published: IEEE 2018-01-01
Series:IEEE Photonics Journal
Subjects:
Echelle gratings
optical fabrication
micro-nano fabrication
spectrometers
Online Access:https://ieeexplore.ieee.org/document/8260913/

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