Au Wire Ball Welding and Its Reliability Test for High-Temperature Environment

The long-term application of sensors in a high-temperature environment needs to address several challenges, such as stability at high temperatures for a long time, better wiring interconnection of sensors, and reliable and steady connection of the sensor and its external equipment. In order to syste...

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Main Authors: Chenyang Wu, Junqiang Wang, Xiaofei Liu, Mengwei Li, Zehua Zhu, Yue Qi
Format: Article
Language:English
Published: MDPI AG 2022-09-01
Series:Micromachines
Subjects:
Online Access:https://www.mdpi.com/2072-666X/13/10/1603
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author Chenyang Wu
Junqiang Wang
Xiaofei Liu
Mengwei Li
Zehua Zhu
Yue Qi
author_facet Chenyang Wu
Junqiang Wang
Xiaofei Liu
Mengwei Li
Zehua Zhu
Yue Qi
author_sort Chenyang Wu
collection DOAJ
description The long-term application of sensors in a high-temperature environment needs to address several challenges, such as stability at high temperatures for a long time, better wiring interconnection of sensors, and reliable and steady connection of the sensor and its external equipment. In order to systematically investigate the reliability of thin coatings at high temperatures for a long time, Au and Cr layers were deposited on silicon substrates by magnetron sputtering. Additionally, samples with different electrode thicknesses were annealed at different temperatures for a varied duration to study the effect of electrode thickness, temperature, and duration on the reliability of samples. The results of tensile and probe tests before and after heat treatment revealed that the mechanical strength and electrical properties have changed after annealing. In addition, the bonding interface was analyzed by a cross-sectional electron microscope. The analysis showed that long-term continuous high-temperature exposure would result in thinning of the electrode, formation of pores, recrystallization, and grain growth, all of which can affect the mechanical strength and electrical properties. In addition, it was observed that increasing the thickness of the gold layer will improve reliability, and the test results show that although the thin metal layer sample is in poor condition, it is still usable. The present study provides theoretical support for the application of thin coatings in high temperatures and harsh environments.
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spelling doaj.art-98ff01b31c17469eba8b261d02c45a712023-11-24T01:21:20ZengMDPI AGMicromachines2072-666X2022-09-011310160310.3390/mi13101603Au Wire Ball Welding and Its Reliability Test for High-Temperature EnvironmentChenyang Wu0Junqiang Wang1Xiaofei Liu2Mengwei Li3Zehua Zhu4Yue Qi5Notional Key Laboratory of Instrumentation Science & Dynamic Measurement, Taiyuan 030051, ChinaNotional Key Laboratory of Instrumentation Science & Dynamic Measurement, Taiyuan 030051, ChinaNotional Key Laboratory of Instrumentation Science & Dynamic Measurement, Taiyuan 030051, ChinaNotional Key Laboratory of Instrumentation Science & Dynamic Measurement, Taiyuan 030051, ChinaNotional Key Laboratory of Instrumentation Science & Dynamic Measurement, Taiyuan 030051, ChinaNotional Key Laboratory of Instrumentation Science & Dynamic Measurement, Taiyuan 030051, ChinaThe long-term application of sensors in a high-temperature environment needs to address several challenges, such as stability at high temperatures for a long time, better wiring interconnection of sensors, and reliable and steady connection of the sensor and its external equipment. In order to systematically investigate the reliability of thin coatings at high temperatures for a long time, Au and Cr layers were deposited on silicon substrates by magnetron sputtering. Additionally, samples with different electrode thicknesses were annealed at different temperatures for a varied duration to study the effect of electrode thickness, temperature, and duration on the reliability of samples. The results of tensile and probe tests before and after heat treatment revealed that the mechanical strength and electrical properties have changed after annealing. In addition, the bonding interface was analyzed by a cross-sectional electron microscope. The analysis showed that long-term continuous high-temperature exposure would result in thinning of the electrode, formation of pores, recrystallization, and grain growth, all of which can affect the mechanical strength and electrical properties. In addition, it was observed that increasing the thickness of the gold layer will improve reliability, and the test results show that although the thin metal layer sample is in poor condition, it is still usable. The present study provides theoretical support for the application of thin coatings in high temperatures and harsh environments.https://www.mdpi.com/2072-666X/13/10/1603Au wire bondinghigh-temperature annealingfocused ion beam (FIB)morphology analysis
spellingShingle Chenyang Wu
Junqiang Wang
Xiaofei Liu
Mengwei Li
Zehua Zhu
Yue Qi
Au Wire Ball Welding and Its Reliability Test for High-Temperature Environment
Micromachines
Au wire bonding
high-temperature annealing
focused ion beam (FIB)
morphology analysis
title Au Wire Ball Welding and Its Reliability Test for High-Temperature Environment
title_full Au Wire Ball Welding and Its Reliability Test for High-Temperature Environment
title_fullStr Au Wire Ball Welding and Its Reliability Test for High-Temperature Environment
title_full_unstemmed Au Wire Ball Welding and Its Reliability Test for High-Temperature Environment
title_short Au Wire Ball Welding and Its Reliability Test for High-Temperature Environment
title_sort au wire ball welding and its reliability test for high temperature environment
topic Au wire bonding
high-temperature annealing
focused ion beam (FIB)
morphology analysis
url https://www.mdpi.com/2072-666X/13/10/1603
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