Three-dimensional isotropic microfabrication in glass using spatiotemporal focusing of high-repetition-rate femtosecond laser pulses
To improve the processing efficiency and extend the tuning range of 3D isotropic fabrication, we apply the simultaneous spatiotemporal focusing (SSTF) technique to a high-repetition-rate femtosecond (fs) fiber laser system. In the SSTF scheme, we propose a pulse compensation scheme for the fiber las...
| Main Authors: | , , , , , , , , , , , , |
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| Format: | Article |
| Language: | English |
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Institue of Optics and Electronics, Chinese Academy of Sciences
2023-10-01
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| Series: | Opto-Electronic Advances |
| Subjects: | |
| Online Access: | https://www.oejournal.org/article/doi/10.29026/oea.2023.230066 |
| _version_ | 1827389224182087680 |
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| author | Yuanxin Tan Haotian Lv Jian Xu Aodong Zhang Yunpeng Song Jianping Yu Wei Chen Yuexin Wan Zhaoxiang Liu Zhaohui Liu Jia Qi Yangjian Cai Ya Cheng |
| author_facet | Yuanxin Tan Haotian Lv Jian Xu Aodong Zhang Yunpeng Song Jianping Yu Wei Chen Yuexin Wan Zhaoxiang Liu Zhaohui Liu Jia Qi Yangjian Cai Ya Cheng |
| author_sort | Yuanxin Tan |
| collection | DOAJ |
| description | To improve the processing efficiency and extend the tuning range of 3D isotropic fabrication, we apply the simultaneous spatiotemporal focusing (SSTF) technique to a high-repetition-rate femtosecond (fs) fiber laser system. In the SSTF scheme, we propose a pulse compensation scheme for the fiber laser with a narrow spectral bandwidth by building an extra-cavity pulse stretcher. We further demonstrate truly 3D isotropic microfabrication in photosensitive glass with a tunable resolution ranging from 8 µm to 22 µm using the SSTF of fs laser pulses. Moreover, we systematically investigate the influences of pulse energy, writing speed, processing depth, and spherical aberration on the fabrication resolution. As a proof-of-concept demonstration, the SSTF scheme was further employed for the fs laser-assisted etching of complicated glass microfluidic structures with 3D uniform sizes. The developed technique can be extended to many applications such as advanced photonics, 3D biomimetic printing, micro-electromechanical systems, and lab-on-a-chips. |
| first_indexed | 2024-03-08T16:31:25Z |
| format | Article |
| id | doaj.art-9a80e6f1b71c48b0b7f8d22e7cd1f44f |
| institution | Directory Open Access Journal |
| issn | 2096-4579 |
| language | English |
| last_indexed | 2024-03-08T16:31:25Z |
| publishDate | 2023-10-01 |
| publisher | Institue of Optics and Electronics, Chinese Academy of Sciences |
| record_format | Article |
| series | Opto-Electronic Advances |
| spelling | doaj.art-9a80e6f1b71c48b0b7f8d22e7cd1f44f2024-01-06T07:27:05ZengInstitue of Optics and Electronics, Chinese Academy of SciencesOpto-Electronic Advances2096-45792023-10-0161011210.29026/oea.2023.230066OEA-2023-0066-CaiyangjianThree-dimensional isotropic microfabrication in glass using spatiotemporal focusing of high-repetition-rate femtosecond laser pulsesYuanxin Tan0Haotian Lv1Jian Xu2Aodong Zhang3Yunpeng Song4Jianping Yu5Wei Chen6Yuexin Wan7Zhaoxiang Liu8Zhaohui Liu9Jia Qi10Yangjian Cai11Ya Cheng12Shandong Provincial Engineering and Technical Center of Light Manipulations Shandong Provincial Key Laboratory of Optics and Photonic Device, School of Physics and Electronics, Shandong Normal University, Jinan 250014, ChinaShandong Provincial Engineering and Technical Center of Light Manipulations Shandong Provincial Key Laboratory of Optics and Photonic Device, School of Physics and Electronics, Shandong Normal University, Jinan 250014, ChinaXXL—The Extreme Optoelectromechanics Laboratory, School of Physics and Electronics Science, East China Normal University, Shanghai 200241, ChinaXXL—The Extreme Optoelectromechanics Laboratory, School of Physics and Electronics Science, East China Normal University, Shanghai 200241, ChinaXXL—The Extreme Optoelectromechanics Laboratory, School of Physics and Electronics Science, East China Normal University, Shanghai 200241, ChinaXXL—The Extreme Optoelectromechanics Laboratory, School of Physics and Electronics Science, East China Normal University, Shanghai 200241, ChinaXXL—The Extreme Optoelectromechanics Laboratory, School of Physics and Electronics Science, East China Normal University, Shanghai 200241, ChinaXXL—The Extreme Optoelectromechanics Laboratory, School of Physics and Electronics Science, East China Normal University, Shanghai 200241, ChinaXXL—The Extreme Optoelectromechanics Laboratory, School of Physics and Electronics Science, East China Normal University, Shanghai 200241, ChinaXXL—The Extreme Optoelectromechanics Laboratory, School of Physics and Electronics Science, East China Normal University, Shanghai 200241, ChinaXXL—The Extreme Optoelectromechanics Laboratory, School of Physics and Electronics Science, East China Normal University, Shanghai 200241, ChinaShandong Provincial Engineering and Technical Center of Light Manipulations Shandong Provincial Key Laboratory of Optics and Photonic Device, School of Physics and Electronics, Shandong Normal University, Jinan 250014, ChinaXXL—The Extreme Optoelectromechanics Laboratory, School of Physics and Electronics Science, East China Normal University, Shanghai 200241, ChinaTo improve the processing efficiency and extend the tuning range of 3D isotropic fabrication, we apply the simultaneous spatiotemporal focusing (SSTF) technique to a high-repetition-rate femtosecond (fs) fiber laser system. In the SSTF scheme, we propose a pulse compensation scheme for the fiber laser with a narrow spectral bandwidth by building an extra-cavity pulse stretcher. We further demonstrate truly 3D isotropic microfabrication in photosensitive glass with a tunable resolution ranging from 8 µm to 22 µm using the SSTF of fs laser pulses. Moreover, we systematically investigate the influences of pulse energy, writing speed, processing depth, and spherical aberration on the fabrication resolution. As a proof-of-concept demonstration, the SSTF scheme was further employed for the fs laser-assisted etching of complicated glass microfluidic structures with 3D uniform sizes. The developed technique can be extended to many applications such as advanced photonics, 3D biomimetic printing, micro-electromechanical systems, and lab-on-a-chips.https://www.oejournal.org/article/doi/10.29026/oea.2023.230066simultaneous spatiotemporal focusing techniquepulse compensationpulse stretcher3d isotropic fabricationchemical etching |
| spellingShingle | Yuanxin Tan Haotian Lv Jian Xu Aodong Zhang Yunpeng Song Jianping Yu Wei Chen Yuexin Wan Zhaoxiang Liu Zhaohui Liu Jia Qi Yangjian Cai Ya Cheng Three-dimensional isotropic microfabrication in glass using spatiotemporal focusing of high-repetition-rate femtosecond laser pulses Opto-Electronic Advances simultaneous spatiotemporal focusing technique pulse compensation pulse stretcher 3d isotropic fabrication chemical etching |
| title | Three-dimensional isotropic microfabrication in glass using spatiotemporal focusing of high-repetition-rate femtosecond laser pulses |
| title_full | Three-dimensional isotropic microfabrication in glass using spatiotemporal focusing of high-repetition-rate femtosecond laser pulses |
| title_fullStr | Three-dimensional isotropic microfabrication in glass using spatiotemporal focusing of high-repetition-rate femtosecond laser pulses |
| title_full_unstemmed | Three-dimensional isotropic microfabrication in glass using spatiotemporal focusing of high-repetition-rate femtosecond laser pulses |
| title_short | Three-dimensional isotropic microfabrication in glass using spatiotemporal focusing of high-repetition-rate femtosecond laser pulses |
| title_sort | three dimensional isotropic microfabrication in glass using spatiotemporal focusing of high repetition rate femtosecond laser pulses |
| topic | simultaneous spatiotemporal focusing technique pulse compensation pulse stretcher 3d isotropic fabrication chemical etching |
| url | https://www.oejournal.org/article/doi/10.29026/oea.2023.230066 |
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