Mid-Infrared Gas Sensing Based on Electromagnetically Induced Transparency in Coupled Plasmonic Resonators

The existence of surface plasmon polaritons in doped silicon micro-scale structures has opened up new and innovative possibilities for applications, such as sensing, imaging, and photonics. A CMOS-compatible doped Si plasmonic sensor is proposed and investigated. The plasmon resonance can be tuned b...

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Main Authors: Sarah Shafaay, Sherif Mohamed, Mohamed Swillam
Format: Article
Language:English
Published: MDPI AG 2023-11-01
Series:Sensors
Subjects:
Online Access:https://www.mdpi.com/1424-8220/23/22/9220
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author Sarah Shafaay
Sherif Mohamed
Mohamed Swillam
author_facet Sarah Shafaay
Sherif Mohamed
Mohamed Swillam
author_sort Sarah Shafaay
collection DOAJ
description The existence of surface plasmon polaritons in doped silicon micro-scale structures has opened up new and innovative possibilities for applications, such as sensing, imaging, and photonics. A CMOS-compatible doped Si plasmonic sensor is proposed and investigated. The plasmon resonance can be tuned by controlling the carrier density and dopant concentration. In this paper, we demonstrate that using silicon doped with phosphorus at a concentration of 5 × 10<inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><msup><mrow></mrow><mn>20</mn></msup></semantics></math></inline-formula> cm<inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><msup><mrow></mrow><mrow><mo>−</mo><mn>3</mn></mrow></msup></semantics></math></inline-formula> can induce surface plasmon resonance in the mid-infrared region. Two ring resonators of two different radii based on metal–insulator–metal waveguide structures are studied individually. Then, the two ring resonators are integrated in the same device. When the two ring resonators are coupled and resonate at the same frequency; two distinct resonance spectral lines are generated with striking features that improve its potential use for sensing and modulation applications. The propagating plasmonic mode is studied, including its mode profile and bend loss. We evaluate the effectiveness of a microstructure gas sensor with dimensions of 15 <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mi mathvariant="sans-serif">μ</mi></semantics></math></inline-formula>m × 15 <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mi mathvariant="sans-serif">μ</mi></semantics></math></inline-formula>m by measuring its sensitivity and selectivity towards methane and ethane gases. Small alterations in the surrounding refractive index led to noticeable shifts in the resonance peak. The sensor achieved a sensitivity of 7539.9 nm/RIU at the mid-infrared spectral range around the 7.7 <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mi mathvariant="sans-serif">μ</mi></semantics></math></inline-formula>m wavelength. Furthermore, by combining the resonators, we can achieve a smaller full width at half maximum (FWHM), which will ultimately result in greater sensitivity than using a single-ring resonator or other plasmonic resonator configurations. Once the sensitivity and selectivity of the sensor are measured, the FOM can be calculated by dividing the sensitivity by the selectivity of the sensor, resulting in an FOM of 6732.
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spelling doaj.art-9ab6b59186e5427ea9ab74fac1d55bad2023-11-24T15:05:47ZengMDPI AGSensors1424-82202023-11-012322922010.3390/s23229220Mid-Infrared Gas Sensing Based on Electromagnetically Induced Transparency in Coupled Plasmonic ResonatorsSarah Shafaay0Sherif Mohamed1Mohamed Swillam2Department of Physics, School of Sciences and Engineering, The American University in Cairo, New Cairo 11835, EgyptDepartment of Physics, School of Sciences and Engineering, The American University in Cairo, New Cairo 11835, EgyptDepartment of Physics, School of Sciences and Engineering, The American University in Cairo, New Cairo 11835, EgyptThe existence of surface plasmon polaritons in doped silicon micro-scale structures has opened up new and innovative possibilities for applications, such as sensing, imaging, and photonics. A CMOS-compatible doped Si plasmonic sensor is proposed and investigated. The plasmon resonance can be tuned by controlling the carrier density and dopant concentration. In this paper, we demonstrate that using silicon doped with phosphorus at a concentration of 5 × 10<inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><msup><mrow></mrow><mn>20</mn></msup></semantics></math></inline-formula> cm<inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><msup><mrow></mrow><mrow><mo>−</mo><mn>3</mn></mrow></msup></semantics></math></inline-formula> can induce surface plasmon resonance in the mid-infrared region. Two ring resonators of two different radii based on metal–insulator–metal waveguide structures are studied individually. Then, the two ring resonators are integrated in the same device. When the two ring resonators are coupled and resonate at the same frequency; two distinct resonance spectral lines are generated with striking features that improve its potential use for sensing and modulation applications. The propagating plasmonic mode is studied, including its mode profile and bend loss. We evaluate the effectiveness of a microstructure gas sensor with dimensions of 15 <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mi mathvariant="sans-serif">μ</mi></semantics></math></inline-formula>m × 15 <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mi mathvariant="sans-serif">μ</mi></semantics></math></inline-formula>m by measuring its sensitivity and selectivity towards methane and ethane gases. Small alterations in the surrounding refractive index led to noticeable shifts in the resonance peak. The sensor achieved a sensitivity of 7539.9 nm/RIU at the mid-infrared spectral range around the 7.7 <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mi mathvariant="sans-serif">μ</mi></semantics></math></inline-formula>m wavelength. Furthermore, by combining the resonators, we can achieve a smaller full width at half maximum (FWHM), which will ultimately result in greater sensitivity than using a single-ring resonator or other plasmonic resonator configurations. Once the sensitivity and selectivity of the sensor are measured, the FOM can be calculated by dividing the sensitivity by the selectivity of the sensor, resulting in an FOM of 6732.https://www.mdpi.com/1424-8220/23/22/9220coupled-ring resonatorsplasmonic modemid-infrared spectral rangedoped siliconoptical sensors
spellingShingle Sarah Shafaay
Sherif Mohamed
Mohamed Swillam
Mid-Infrared Gas Sensing Based on Electromagnetically Induced Transparency in Coupled Plasmonic Resonators
Sensors
coupled-ring resonators
plasmonic mode
mid-infrared spectral range
doped silicon
optical sensors
title Mid-Infrared Gas Sensing Based on Electromagnetically Induced Transparency in Coupled Plasmonic Resonators
title_full Mid-Infrared Gas Sensing Based on Electromagnetically Induced Transparency in Coupled Plasmonic Resonators
title_fullStr Mid-Infrared Gas Sensing Based on Electromagnetically Induced Transparency in Coupled Plasmonic Resonators
title_full_unstemmed Mid-Infrared Gas Sensing Based on Electromagnetically Induced Transparency in Coupled Plasmonic Resonators
title_short Mid-Infrared Gas Sensing Based on Electromagnetically Induced Transparency in Coupled Plasmonic Resonators
title_sort mid infrared gas sensing based on electromagnetically induced transparency in coupled plasmonic resonators
topic coupled-ring resonators
plasmonic mode
mid-infrared spectral range
doped silicon
optical sensors
url https://www.mdpi.com/1424-8220/23/22/9220
work_keys_str_mv AT sarahshafaay midinfraredgassensingbasedonelectromagneticallyinducedtransparencyincoupledplasmonicresonators
AT sherifmohamed midinfraredgassensingbasedonelectromagneticallyinducedtransparencyincoupledplasmonicresonators
AT mohamedswillam midinfraredgassensingbasedonelectromagneticallyinducedtransparencyincoupledplasmonicresonators