Microfabrication of a multiplexed device for controlled deposition of miniaturised copper-structures for glucose electro-oxidation in biological and chemical matrices
The electrochemical multiplexed sensing has been gaining attention since this approach allows one to merge several sensing areas into a single compact chip. Here, we show several routes for the successful wafer scale microfabrication of a multiplexed silicon chip consisting of six ultramicro single...
| Main Authors: | , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2023-05-01
|
| Series: | Biosensors and Bioelectronics: X |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2590137023000122 |