Plasma jet assisted polishing of fused silica freeform optics

Atmospheric pressure plasma jet machining technology not only provides a flexible and efficient way to generate and correct optical freeform surfaces made of fused silica, it can also be applied as a surface smoothing or polishing technique. Thermal plasma jet treatment leads to softening and redist...

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Main Authors: Arnold Thomas, Boehm Georg, Mueller Heike, Ehrhardt Martin, Zimmer Klaus
Format: Article
Language:English
Published: EDP Sciences 2022-01-01
Series:EPJ Web of Conferences
Online Access:https://www.epj-conferences.org/articles/epjconf/pdf/2022/10/epjconf_eosam2022_03001.pdf
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author Arnold Thomas
Boehm Georg
Mueller Heike
Ehrhardt Martin
Zimmer Klaus
author_facet Arnold Thomas
Boehm Georg
Mueller Heike
Ehrhardt Martin
Zimmer Klaus
author_sort Arnold Thomas
collection DOAJ
description Atmospheric pressure plasma jet machining technology not only provides a flexible and efficient way to generate and correct optical freeform surfaces made of fused silica, it can also be applied as a surface smoothing or polishing technique. Thermal plasma jet treatment leads to softening and redistribution of the material. An accurate temperature regime during the process is inevitable to achieve a uniformly smoothed surface. The possibilities for inȭprocess temperature control are demonstrated. Surface roughness values can be significantly reduced by a factor of 1000 depending on the initial roughness of the ground surface.
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spelling doaj.art-9b1e212e2ca74ca59c6e08c581382aca2022-12-22T02:36:45ZengEDP SciencesEPJ Web of Conferences2100-014X2022-01-012660300110.1051/epjconf/202226603001epjconf_eosam2022_03001Plasma jet assisted polishing of fused silica freeform opticsArnold Thomas0Boehm Georg1Mueller Heike2Ehrhardt Martin3Zimmer Klaus4Technische Universität Dresden, Institut für FertigungstechnikLeibniz Institute of Surface Engineering (IOM)Leibniz Institute of Surface Engineering (IOM)Leibniz Institute of Surface Engineering (IOM)Leibniz Institute of Surface Engineering (IOM)Atmospheric pressure plasma jet machining technology not only provides a flexible and efficient way to generate and correct optical freeform surfaces made of fused silica, it can also be applied as a surface smoothing or polishing technique. Thermal plasma jet treatment leads to softening and redistribution of the material. An accurate temperature regime during the process is inevitable to achieve a uniformly smoothed surface. The possibilities for inȭprocess temperature control are demonstrated. Surface roughness values can be significantly reduced by a factor of 1000 depending on the initial roughness of the ground surface.https://www.epj-conferences.org/articles/epjconf/pdf/2022/10/epjconf_eosam2022_03001.pdf
spellingShingle Arnold Thomas
Boehm Georg
Mueller Heike
Ehrhardt Martin
Zimmer Klaus
Plasma jet assisted polishing of fused silica freeform optics
EPJ Web of Conferences
title Plasma jet assisted polishing of fused silica freeform optics
title_full Plasma jet assisted polishing of fused silica freeform optics
title_fullStr Plasma jet assisted polishing of fused silica freeform optics
title_full_unstemmed Plasma jet assisted polishing of fused silica freeform optics
title_short Plasma jet assisted polishing of fused silica freeform optics
title_sort plasma jet assisted polishing of fused silica freeform optics
url https://www.epj-conferences.org/articles/epjconf/pdf/2022/10/epjconf_eosam2022_03001.pdf
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AT muellerheike plasmajetassistedpolishingoffusedsilicafreeformoptics
AT ehrhardtmartin plasmajetassistedpolishingoffusedsilicafreeformoptics
AT zimmerklaus plasmajetassistedpolishingoffusedsilicafreeformoptics