Plasma jet assisted polishing of fused silica freeform optics

Atmospheric pressure plasma jet machining technology not only provides a flexible and efficient way to generate and correct optical freeform surfaces made of fused silica, it can also be applied as a surface smoothing or polishing technique. Thermal plasma jet treatment leads to softening and redist...

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Bibliographic Details
Main Authors: Arnold Thomas, Boehm Georg, Mueller Heike, Ehrhardt Martin, Zimmer Klaus
Format: Article
Language:English
Published: EDP Sciences 2022-01-01
Series:EPJ Web of Conferences
Online Access:https://www.epj-conferences.org/articles/epjconf/pdf/2022/10/epjconf_eosam2022_03001.pdf

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