Plasma jet assisted polishing of fused silica freeform optics
Atmospheric pressure plasma jet machining technology not only provides a flexible and efficient way to generate and correct optical freeform surfaces made of fused silica, it can also be applied as a surface smoothing or polishing technique. Thermal plasma jet treatment leads to softening and redist...
Main Authors: | Arnold Thomas, Boehm Georg, Mueller Heike, Ehrhardt Martin, Zimmer Klaus |
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Format: | Article |
Language: | English |
Published: |
EDP Sciences
2022-01-01
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Series: | EPJ Web of Conferences |
Online Access: | https://www.epj-conferences.org/articles/epjconf/pdf/2022/10/epjconf_eosam2022_03001.pdf |
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