Transparent and Flexible SiOC Films on Colorless Polyimide Substrate for Flexible Cover Window
We fabricated transparent and flexible silicon oxycarbide (SiOC) hard coating (HC) films on a colorless polyimide substrate to use as cover window films for flexible and foldable displays using a reactive roll-to-roll (R2R) sputtering system at room temperature. At a SiOC thickness of 100 nm, the R2...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2021-02-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/12/3/233 |
| _version_ | 1827588314383777792 |
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| author | Jin-Hyeok Park Chan-Hwi Kim Ju-Hyeon Lee Han-Ki Kim |
| author_facet | Jin-Hyeok Park Chan-Hwi Kim Ju-Hyeon Lee Han-Ki Kim |
| author_sort | Jin-Hyeok Park |
| collection | DOAJ |
| description | We fabricated transparent and flexible silicon oxycarbide (SiOC) hard coating (HC) films on a colorless polyimide substrate to use as cover window films for flexible and foldable displays using a reactive roll-to-roll (R2R) sputtering system at room temperature. At a SiOC thickness of 100 nm, the R2R-sputtered SiOC film showed a high optical transmittance of 87.43% at a visible range of 400 to 800 nm. The R2R-sputtered SiOC films also demonstrated outstanding flexibility, which is a key requirement of foldable and flexible displays. There were no cracks or surface defects on the SiOC films, even after bending (static folding), folding (dynamic folding), twisting, and rolling tests. Furthermore, the R2R-sputtered SiOC film showed good scratch resistance in a pencil hardness test (550 g) and steel wool test under a load of 250 g. To test the impact protection ability, we compared the performance of thin-film heaters (TFHs) and oxide-semiconductor-based thin-film transistors (TFTs) with and without SiOC cover films. The similar performance of the TFHs and TFTs with the SiOC cover window films demonstrate that the R2R-sputtered SiOC films offer promising cover window films for the next generation of flexible or foldable displays. |
| first_indexed | 2024-03-09T00:32:41Z |
| format | Article |
| id | doaj.art-9b6cdfbeeb49484da3e01047621cbd65 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-09T00:32:41Z |
| publishDate | 2021-02-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-9b6cdfbeeb49484da3e01047621cbd652023-12-11T18:23:44ZengMDPI AGMicromachines2072-666X2021-02-0112323310.3390/mi12030233Transparent and Flexible SiOC Films on Colorless Polyimide Substrate for Flexible Cover WindowJin-Hyeok Park0Chan-Hwi Kim1Ju-Hyeon Lee2Han-Ki Kim3School of Advanced Materials Science and Engineering, Sungkyunkwan University, Suwon-si, Gyeonggi-do 16419, KoreaSchool of Advanced Materials Science and Engineering, Sungkyunkwan University, Suwon-si, Gyeonggi-do 16419, KoreaSchool of Advanced Materials Science and Engineering, Sungkyunkwan University, Suwon-si, Gyeonggi-do 16419, KoreaSchool of Advanced Materials Science and Engineering, Sungkyunkwan University, Suwon-si, Gyeonggi-do 16419, KoreaWe fabricated transparent and flexible silicon oxycarbide (SiOC) hard coating (HC) films on a colorless polyimide substrate to use as cover window films for flexible and foldable displays using a reactive roll-to-roll (R2R) sputtering system at room temperature. At a SiOC thickness of 100 nm, the R2R-sputtered SiOC film showed a high optical transmittance of 87.43% at a visible range of 400 to 800 nm. The R2R-sputtered SiOC films also demonstrated outstanding flexibility, which is a key requirement of foldable and flexible displays. There were no cracks or surface defects on the SiOC films, even after bending (static folding), folding (dynamic folding), twisting, and rolling tests. Furthermore, the R2R-sputtered SiOC film showed good scratch resistance in a pencil hardness test (550 g) and steel wool test under a load of 250 g. To test the impact protection ability, we compared the performance of thin-film heaters (TFHs) and oxide-semiconductor-based thin-film transistors (TFTs) with and without SiOC cover films. The similar performance of the TFHs and TFTs with the SiOC cover window films demonstrate that the R2R-sputtered SiOC films offer promising cover window films for the next generation of flexible or foldable displays.https://www.mdpi.com/2072-666X/12/3/233SiOChard coating filmscolorless polyimideflexible and foldable displaysroll-to-toll sputtering |
| spellingShingle | Jin-Hyeok Park Chan-Hwi Kim Ju-Hyeon Lee Han-Ki Kim Transparent and Flexible SiOC Films on Colorless Polyimide Substrate for Flexible Cover Window Micromachines SiOC hard coating films colorless polyimide flexible and foldable displays roll-to-toll sputtering |
| title | Transparent and Flexible SiOC Films on Colorless Polyimide Substrate for Flexible Cover Window |
| title_full | Transparent and Flexible SiOC Films on Colorless Polyimide Substrate for Flexible Cover Window |
| title_fullStr | Transparent and Flexible SiOC Films on Colorless Polyimide Substrate for Flexible Cover Window |
| title_full_unstemmed | Transparent and Flexible SiOC Films on Colorless Polyimide Substrate for Flexible Cover Window |
| title_short | Transparent and Flexible SiOC Films on Colorless Polyimide Substrate for Flexible Cover Window |
| title_sort | transparent and flexible sioc films on colorless polyimide substrate for flexible cover window |
| topic | SiOC hard coating films colorless polyimide flexible and foldable displays roll-to-toll sputtering |
| url | https://www.mdpi.com/2072-666X/12/3/233 |
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