Transparent and Flexible SiOC Films on Colorless Polyimide Substrate for Flexible Cover Window

Transparent and Flexible SiOC Films on Colorless Polyimide Substrate for Flexible Cover Window

We fabricated transparent and flexible silicon oxycarbide (SiOC) hard coating (HC) films on a colorless polyimide substrate to use as cover window films for flexible and foldable displays using a reactive roll-to-roll (R2R) sputtering system at room temperature. At a SiOC thickness of 100 nm, the R2...

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Bibliographic Details
Main Authors: Jin-Hyeok Park, Chan-Hwi Kim, Ju-Hyeon Lee, Han-Ki Kim
Format: Article
Language:English
Published: MDPI AG 2021-02-01
Series:Micromachines
Subjects:
SiOC
hard coating films
colorless polyimide
flexible and foldable displays
roll-to-toll sputtering
Online Access:https://www.mdpi.com/2072-666X/12/3/233

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